Journal ArticleDOI
Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry
Seung-Woo Kim,Gee-Hong Kim +1 more
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TLDR
An extensive frequency-domain analysis of multiple reflection is performed to allow both the top and the bottom interfaces of a thin-film layer to be measured independently at the same time by the nonlinear least-squares technique.Abstract:
White-light scanning interferometry is increasingly used for precision profile metrology of engineering surfaces, but its current applications are limited primarily to opaque surfaces with relatively simple optical reflection behavior. A new attempt is made to extend the interferometric method to the thickness-profile measurement of transparent thin-film layers. An extensive frequency-domain analysis of multiple reflection is performed to allow both the top and the bottom interfaces of a thin-film layer to be measured independently at the same time by the nonlinear least-squares technique. This rigorous approach provides not only point-by-point thickness probing but also complete volumetric film profiles digitized in three dimensions.read more
Citations
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Journal ArticleDOI
Rayleigh Imaging of Graphene and Graphene Layers
Cinzia Casiraghi,Achim Hartschuh,Elefterios Lidorikis,Huihong Qian,Hayk Harutyunyan,Tobias Gokus,Kostya S. Novoselov,Andrea C. Ferrari +7 more
TL;DR: Rayleigh imaging is a general, simple, and quick tool to identify graphene layers, which is readily combined with Raman scattering, that provides structural identification.
Journal ArticleDOI
Beyond biomedicine: a review of alternative applications and developments for optical coherence tomography
TL;DR: A detailed overview of the so far presented OCT-based methods and applications, ranging from dimensional metrology, material research and non-destructive testing, over art diagnostics, botany, microfluidics to data storage and security applications, and include new data from a study on penetration depths in various polymer materials.
Journal ArticleDOI
Principles of interference microscopy for the measurement of surface topography
TL;DR: Recent advances considered here include performance improvements, vibration robustness, full color imaging, accommodation of highly sloped surfaces, correlation to contact methods, transparent film analysis, and international standardization of calibration and specification.
Journal ArticleDOI
Determination of fringe order in white-light interference microscopy
TL;DR: The algorithm adapts to surface texture and noise level and dynamically compensates for optical aberrations, distortions, diffraction, and dispersion that would otherwise lead to incorrect fringe order.
Patent
Profiling complex surface structures using scanning interferometry
TL;DR: In this paper, a method including comparing information derived from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object was proposed.
References
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Journal ArticleDOI
Efficient nonlinear algorithm for envelope detection in white light interferometry
TL;DR: The new algorithm is shown to be near optimal in terms of computational efficiency and can be represented as a second-order nonlinear filter and in combination with a carefully designed peak detection method the algorithm exhibits exceptionally good performance on simulated interferograms.
Journal ArticleDOI
Mirau correlation microscope.
TL;DR: A correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter is constructed, which predicts accurately both the transverse resolution at a sharp edge and the range resolution for a perfect plane reflector.
Journal ArticleDOI
High-speed noncontact profiler based on scanning white-light interferometry
Leslie L. Deck,Peter J. de Groot +1 more
TL;DR: A system for fast three-dimensional profilometry, of both optically smooth and optically rough surfaces, based on scanning white-light techniques, using an efficient algorithm to extract and save only the region of interference, substantially reducing both the acquisition and the analysis times.
Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
TL;DR: In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.
Journal ArticleDOI
Interferometric profiler for rough surfaces
TL;DR: A new method of optical, noncontact profiling of rough surfaces is described that utilizes interferometric techniques as well as digital signal-processing algorithms to produce fast, accurate, and repeatable three-dimensional surface profile measurements.