Journal ArticleDOI
Mirau correlation microscope.
TLDR
A correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter is constructed, which predicts accurately both the transverse resolution at a sharp edge and the range resolution for a perfect plane reflector.Abstract:
We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter. This microscope provides the amplitude and phase information for the reflected signal from a sample located on the microscope-object plane. The device is remarkably insensitive to vibrations and is self-correcting for spherical and chromatic range aberrations of the objective. An imaging theory for the correlation microscope has been derived, which predicts accurately both the transverse resolution at a sharp edge and the range resolution for a perfect plane reflector. The range resolution is slightly better than that for a scanning optical microscope using a lens with the same aperture.read more
Citations
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Optical coherence tomography (OCT): a review
TL;DR: The state of the art of optical coherence tomography (OCT), an interferometric imaging technique that provides cross-sectional views of the subsurface microstructure of biological tissue is reviewed.
Journal ArticleDOI
Confocal optical microscopy
TL;DR: The confocal optical microscopy technique as discussed by the authors is a technique for increasing the contrast of microscope images, particularly in thick specimens, by restricting the observed volume, the technique keeps overlying or nearby scatterers from contributing to the detected signal.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.
References
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Journal ArticleDOI
Real‐time confocal scanning optical microscope
TL;DR: In this article, a real-time confocal scanning optical microscope is described, which is capable of generating 640 frames per second with 7000 lines per frame, achieving this speed by simultaneously illuminating several thousand pinholes arranged in a spiral pattern on a rotating disk.
Proceedings ArticleDOI
An Application Of Interference Microscopy To Integrated Circuit Inspection And Metrology
TL;DR: In this paper, the results of recent research on synthetic electro-optic imaging using a Linnik interference microscope are presented, and a new technique is used in which images are produced by calculating the degree of coherence between corresponding pixels in the object and reference image planes of the coherence probe microscope.
Journal ArticleDOI
Generalizing the confocal microscope via heterodyne interferometry and digital filtering
TL;DR: In this article, a generalized confocal optical microscope which measures both phase and amplitude, separately and simultaneously, is described. And it can take data at the rate of 50,000 points per second, to an accuracy of 12 bits in amplitude and about the same in phase.
Journal ArticleDOI
A novel thin film interferometer
S. C. Chim,P. A. Beck,G. S. Kino +2 more
TL;DR: In this paper, a Mireau interferometer combining silicon nitride and metal films is characterized, and reflectance and transmittance curves are shown, where metal films are applied to microscopy operation.