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It is revealed that the proposed simulation method can reproduce reasonably the crack initiation and propagation, and predict well the change of the mechanical behaviour due to the openings.
The results demonstrate that the method works well for difficult kinked/junction crack problems.
The results show that the robust gate assignment reduces the number of gate conflicts caused by gate holding compared to the original gate assignment.
In addition, it is shown that the slope of the mean lift curve acting on the gate bottom provides an effective means of predicting with reasonable accuracy the critical range of gate openings with respect to potential gate vibration.
It demonstrates that the proposed scheme is an effective technique for dealing with crack propagation problems.
Open accessJournal ArticleDOI
Z. Mei, J.W. Morris 
37 Citations
The result indicates that the exact determination of crack closure point by compliance measurement is inherently difficult.
Results show that crack behavior is greatly influenced by mechanical constraint intensity.
It is shown that the simulated crack trajectory compares favorably with that of experimental results.
The effect might be explained by the residual mechanical stress caused by the involvement of the nitrogen atoms in the gate oxide
It is shown that the computed crack path justifies experimental observations.