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Akira Kinbara

Researcher at University of Tokyo

Publications -  116
Citations -  2283

Akira Kinbara is an academic researcher from University of Tokyo. The author has contributed to research in topics: Thin film & Sputtering. The author has an hindex of 26, co-authored 116 publications receiving 2211 citations.

Papers
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Sound velocity and internal friction in vacuum-deposited gold films

TL;DR: In this paper, the velocity and attenuation of ultrasonic sound waves propagating through self-supporting vacuum-deposited gold films were measured by the pulse-echo method.
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LaBx thin films prepared by magnetron sputtering

TL;DR: In this article, a magnetron sputtering target and a LaB6 target and Ar discharge gas were used to produce thin LaBx thin films, and the composition of the films was investigated by the ICP method.
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Internal stress and adhesion of r.f.-sputtered MgO films on glass substrates☆

TL;DR: In this paper, the effects of the introduction of oxygen in the sputtering gas and the substrate bias on the internal stress and the film adhesion were studied, and the tribological characteristics were examined with a new scratch tester.
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Room temperature crystallization by RF plasma

TL;DR: In this paper, the crystallization of amorphous thin films was achieved by radiofrequency (RF) plasma treatment, and the obtained films indicate almost the same photocatalytic activities as that of thermally crystallized TiO 2 films.
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Adhesion measurement of metal films on a Si(111) surface by a microtribometer

TL;DR: In this paper, an adhesion test device based on the vibration of and scratching by a diamond stylus is interpreted in detail, applied to the adhesion measurement of several metal f...