E
Eric M. Gullikson
Researcher at Lawrence Berkeley National Laboratory
Publications - 424
Citations - 15937
Eric M. Gullikson is an academic researcher from Lawrence Berkeley National Laboratory. The author has contributed to research in topics: Extreme ultraviolet lithography & Extreme ultraviolet. The author has an hindex of 45, co-authored 412 publications receiving 14639 citations. Previous affiliations of Eric M. Gullikson include University of California, San Diego & University of California, Berkeley.
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Journal ArticleDOI
Characterization of CsI photocathodes at grazing incidence for use in a unit quantum efficiency x-ray streak camera
TL;DR: In this paper, the performance of CsI photocathodes for use with grazing incidence soft x rays was characterized for the purpose of measuring the total electron yield and pulsed quantum efficiency.
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Transmission grating spectrometer for characterization of undulator radiation
TL;DR: In this paper, a transmission grating spectrometer has been built to investigate undulator radiation at the Advanced Light Source, which covers the spectral range from 10 to 620 A with a spectral resolution from 0.02 to 1 A (depending on the wavelength).
Proceedings ArticleDOI
Optical Constants of Beryllium from Photoabsorption Measurements for X-Ray Optics Applications
TL;DR: In this paper, the absorption of beryllium-based multilayer mirrors for extreme ultraviolet (EUV) and x-ray imaging has been investigated using transmission measurements on free-standing BER foils.
Proceedings ArticleDOI
Techniques for directly measuring the absorbance of photoresists at EUV wavelengths
Manish Chandhok,Heidi Cao,Wang Yueh,Eric M. Gullikson,Robert L. Brainard,Stewart A. Robertson +5 more
TL;DR: In this article, the authors compare calculations using density measurements of EUV-2D by a variety of methods: traditional weight measurements and Specular X-ray reflectivity (SXR) to determine density; and against grazing incidence and normal incidence reflectivity measurements to determine absorbance directly.
Journal ArticleDOI
Optical constants of magnetron-sputtered magnesium films in the 25-1300 eV energy range
TL;DR: In this article, the transmittance of dc magnetron-sputtered Mg thin films was measured in the 25-1300 eV spectral range and the extinction coefficient k of Mg films was obtained using the Kramers-Kronig analysis.