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Eric M. Gullikson
Researcher at Lawrence Berkeley National Laboratory
Publications - 424
Citations - 15937
Eric M. Gullikson is an academic researcher from Lawrence Berkeley National Laboratory. The author has contributed to research in topics: Extreme ultraviolet lithography & Extreme ultraviolet. The author has an hindex of 45, co-authored 412 publications receiving 14639 citations. Previous affiliations of Eric M. Gullikson include University of California, San Diego & University of California, Berkeley.
Papers
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Journal ArticleDOI
Effects of O and N impurities on the nanostructural evolution during growth of Cr/Sc multilayers
Naureen Ghafoor,Fredrik Eriksson,A. S. Mikhaylushkin,Igor A. Abrikosov,Eric M. Gullikson,Ulrich Kressig,Manfred Beckers,Lars Hultman,Jens Birch +8 more
TL;DR: In this paper, the influence of impurities N and O as residual gas elements on the growth, structure, and optical performance of transition metal multilayers was investigated in high vacuum conditions by a dual cathode direct current magnetron sputter deposition.
Proceedings ArticleDOI
Out-of-band exposure characterization with the SEMATECH Berkeley 0.3-NA microfield exposure tool
TL;DR: In this paper, the authors present the optical design for the new DUV component and the simulation-based results predicting the potential impact of OOB based on known resist, mask, and multilayer conditions.
Proceedings ArticleDOI
Defect repair for extreme-ultraviolet lithography (EUVL) mask blanks
Stefan P. Hau-Riege,Anton Barty,Paul B. Mirkarimi,Daniel G. Stearns,Henry N. Chapman,Donald W. Sweeney,W. Miles Clift,Eric M. Gullikson,Moonsuk Yi +8 more
TL;DR: In this article, the authors discuss the selection of a capping layer for amplitude-defect repair, and report on experimental results of the reflectance variation over the amplitude defect repair zone for different capping layers.
Journal ArticleDOI
Momentum-resolved resonant inelastic soft X-ray scattering (qRIXS) endstation at the ALS
Yi-De Chuang,Xuefei Feng,Alejandro G. Cruz,Kelly Hanzel,Adam Brown,Adrian Spucces,Alex Frano,Alex Frano,Wei-Sheng Lee,Jaemyung Kim,Yu Jen Chen,Brian M. Smith,John Pepper,Y. C. Shao,Y. C. Shao,S. W. Huang,L. Andrew Wray,Eric M. Gullikson,Zhi-Xun Shen,Zhi-Xun Shen,Thomas P. Devereaux,Anton S. Tremsin,Wanli Yang,Jinghua Guo,Robert Duarte,Zahid Hussain +25 more
TL;DR: A momentum resolved resonant inelastic X-ray scattering (qRIXS) experimental station with continuously rotatable spectrometers and parallel detection is designed to operate at different beamlines at synchrotron and free electron laser (FEL) facilities as discussed by the authors.
Journal ArticleDOI
Optical constants of magnetron sputtered Pt thin films with improved accuracy in the N- and O-electronic shell absorption regions
Regina Soufli,Franck Delmotte,Julia Meyer-Ilse,Farhad Salmassi,Nicolai Brejnholt,Sonny Massahi,David Girou,Finn Erland Christensen,Eric M. Gullikson +8 more
TL;DR: In this article, a self-consistent determination of the optical constants (refractive index) of Pt using a combination of photoabsorption and reflectance data in the photon energy range 25 −778 eV was presented.