E
Eric M. Gullikson
Researcher at Lawrence Berkeley National Laboratory
Publications - 424
Citations - 15937
Eric M. Gullikson is an academic researcher from Lawrence Berkeley National Laboratory. The author has contributed to research in topics: Extreme ultraviolet lithography & Extreme ultraviolet. The author has an hindex of 45, co-authored 412 publications receiving 14639 citations. Previous affiliations of Eric M. Gullikson include University of California, San Diego & University of California, Berkeley.
Papers
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Journal ArticleDOI
Probing single-unit-cell resolved electronic structure modulations in oxide superlattices with standing-wave photoemission
Weibing Yang,Ravini U. Chandrasena,Mingqiang Gu,R. dos Reis,Eun Ju Moon,Arian Arab,Marius-Adrian Husanu,Slavomír Nemšák,Eric M. Gullikson,Jim Ciston,Vladimir N. Strocov,James M. Rondinelli,Steven J. May,Alexander X. Gray +13 more
TL;DR: Yang et al. as discussed by the authors used a combination of core-level and valence-band soft x-ray standing-wave photoemission spectroscopy, in conjunction with scanning transmission electron microscopy, to probe the depth-dependent and single unit-cell resolved electronic structure of an isovalent manganite superlattice [Eu0.7Sr0.3MnO3/La0.
Proceedings ArticleDOI
Manufacture and performance of blazed soft x-ray transmission gratings for Arcus and Lynx
Ralf K. Heilmann,Alexander R. Bruccoleri,Jungki Song,Bethany Levenson,Brian Smallshaw,Mallory Whalen,Alan Garner,Sarah N. T. Heine,Herman L. Marshall,Matthew T. Cook,J. A. Gregory,Renee D. Lambert,Dmitri Shapiro,Douglas J. Young,Eric M. Gullikson,Tomoyuki Nonaka,Akimi Uchida,Manuel A. Quijada,Ed Hertz,Peter Cheimets,Randall K. Smith,Mark L. Schattenburg +21 more
TL;DR: In this paper, a new grating-to-grating alignment technique utilizing cross-support diffraction of visible light is presented, as well as the results of CAT grating emissivity measurements.
Journal ArticleDOI
Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet
Jennifer Rebellato,Jennifer Rebellato,Regina Soufli,Evgueni Meltchakov,Eric M. Gullikson,Sébastien de Rossi,Cédric Baumier,Florian Pallier,Franck Delmotte +8 more
TL;DR: In this article, the structural characterization of Al/Sc-based periodic multilayer coatings for the extreme ultraviolet (EUV) spectral range is presented based on transmission electron microscopy and electron diffraction as well as grazing-incidence and large-angle x-ray diffraction.
Journal ArticleDOI
Multilayer phase-only diffraction gratings: Fabrication and application to extreme ultraviolet optics
TL;DR: In this paper, an effective fabrication and etch process enabling high-resolution patterning of Mo/Si multilayers for use in EUV phase devices was presented, providing another method for fabrication of high numerical aperture diffractive devices.
Journal ArticleDOI
Chemical State Analysis of Entrapped Nitrogen in Carbon Nanohorns Using Soft X-ray Emission and Absorption Spectroscopy
TL;DR: The chemical state of nitrogen in nitrogen-entrapped carbon nanohorns (N-CNHs) synthesized by submerged arc discharge in liquid nitrogen was determined by soft X-ray emission and absorption spectroscopy using synchrotron radiation.