M
M. E. Loomans
Researcher at Agency for Science, Technology and Research
Publications - 2
Citations - 297
M. E. Loomans is an academic researcher from Agency for Science, Technology and Research. The author has contributed to research in topics: Crystallization & Amorphous solid. The author has an hindex of 2, co-authored 2 publications receiving 286 citations.
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Journal ArticleDOI
Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
M.-Y. Ho,Hao Gong,Glen D. Wilk,B. W. Busch,Martin L. Green,Paul M. Voyles,David A. Muller,M. Bude,W.H. Lin,Alex See,M. E. Loomans,S. K. Lahiri,Petri Räisänen +12 more
TL;DR: In this article, the effects of annealing on the morphology and crystallization kinetics for the high-κ gate dielectric replacement candidate hafnium oxide (HfO2) were reported.
Journal ArticleDOI
Suppressed crystallization of Hf-based gate dielectrics by controlled addition of Al2O3 using atomic layer deposition
M.-Y. Ho,Hao Gong,G. D. Wilk,B. Busch,B. Busch,Martin L. Green,W.H. Lin,Alex See,S. K. Lahiri,M. E. Loomans,Petri Räisänen,Torgny Gustafsson +11 more
TL;DR: In this article, the authors demonstrate improved thermal stability of the amorphous phase for hafnium-based gate dielectrics through the controlled addition of Al2O3.