R
R. Jammy
Researcher at SEMATECH
Publications - 124
Citations - 2141
R. Jammy is an academic researcher from SEMATECH. The author has contributed to research in topics: High-κ dielectric & Metal gate. The author has an hindex of 24, co-authored 124 publications receiving 2015 citations.
Papers
More filters
Journal ArticleDOI
Gate stack technology for nanoscale devices
TL;DR: In this article, the current status of and challenges in gate stack research for planar CMOS devices and alternative device technologies are reviewed to provide insights for future research, but many challenges remain before alternative gate stacks can be introduced into mainstream technology.
Journal ArticleDOI
Grain boundary-driven leakage path formation in HfO2 dielectrics
Gennadi Bersuker,J. H. Yum,Luca Vandelli,Andrea Padovani,Luca Larcher,V. Iglesias,V. Iglesias,Marc Porti,Marc Porti,Montserrat Nafria,Montserrat Nafria,Keith P. McKenna,Keith P. McKenna,Keith P. McKenna,Alexander L. Shluger,Alexander L. Shluger,Alexander L. Shluger,Paul Kirsch,R. Jammy +18 more
TL;DR: In this paper, the evolution over time of leakage current in HfO 2 -based MIM capacitors under continuous or periodic constant voltage stress (CVS) was studied for a range of stress voltages and temperatures.
Journal ArticleDOI
Higher permittivity rare earth doped HfO2 for sub-45-nm metal-insulator-semiconductor devices
Shrinivas Govindarajan,T. S. Boscke,P. Sivasubramani,Paul Kirsch,Paul Kirsch,Byoung Hun Lee,Byoung Hun Lee,H.-H. Tseng,R. Jammy,Uwe Schröder,Shriram Ramanathan,B. E. Gnade,B. E. Gnade +12 more
TL;DR: In this paper, rare earth (RE) doping of HfO2 has been shown to reduce leakage current by three orders of magnitude compared with pure O2 and ZrREO by stabilizing the higher permittivity tetragonal phase.
Proceedings ArticleDOI
Metal oxide RRAM switching mechanism based on conductive filament microscopic properties
Gennadi Bersuker,David Gilmer,Dmitry Veksler,J. H. Yum,Hokyung Park,S. Lian,Luca Vandelli,Andrea Padovani,Luca Larcher,Keith P. McKenna,Alexander L. Shluger,V. Iglesias,Marc Porti,Montserrat Nafria,W. Taylor,Paul Kirsch,R. Jammy +16 more
TL;DR: By combining electrical, physical, and transport/atomistic modeling results, the authors identifies critical conductive filament features controlling TiN/HfO 2 /TiN resistive memory operations.
Proceedings ArticleDOI
Low power operating bipolar TMO ReRAM for sub 10 nm era
Moo-young Kim,In-Gyu Baek,Y. H. Ha,Seung Jae Baik,Jin-Ho Kim,Dong-Jun Seong,S. J. Kim,Yong Hun Kwon,C. R. Lim,Hokyung Park,David Gilmer,Paul Kirsch,R. Jammy,Yun-Seung Shin,S. Choi,Chilhee Chung +15 more
TL;DR: In this paper, the authors report a method to acquire low operational currents from a hetero-structured ReRAM (AlOx/TiOx) by tuning tunnel oxide properties along with adopting 5 nm sized “Dash BE.