S
Shyh-Wei Wang
Researcher at TSMC
Publications - 8
Citations - 137
Shyh-Wei Wang is an academic researcher from TSMC. The author has contributed to research in topics: Gate oxide & Electron mobility. The author has an hindex of 6, co-authored 8 publications receiving 130 citations.
Papers
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Journal ArticleDOI
A Constant-Mobility Method to Enable MOSFET Series-Resistance Extraction
TL;DR: In this paper, a new method of extracting the MOSFET series resistance is proposed, which requires only simple dc measurements on a single test device, without requiring quantities such as gate-oxide thickness, physical gate length, or effective channel length.
Journal ArticleDOI
InAs hole inversion and bandgap interface state density of 2 x 10(11) cm(-2) eV(-1) at HfO2/InAs interfaces
Chien-Hsun Wang,Shyh-Wei Wang,G. Doornbos,Gvidas Astromskas,Krishna Kumar Bhuwalka,R. Contreras-Guerrero,M. Edirisooriya,J.S. Rojas-Ramirez,Georgios Vellianitis,Richard Kenneth Oxland,M. Holland,C. H. Hsieh,Peter Ramvall,Erik Lind,Wei-Chou Hsu,Lars-Erik Wernersson,R. Droopad,M. Passlack,Carlos H. Diaz +18 more
TL;DR: Capacitance-voltage curves revert to essentially classical shape revealing mobile carrier response in accumulation and depletion, hole inversion is observed, and predicted minority carrier response frequency in the hundred kHz range is experimentally confirmed; reference samples using conventional techniques show a trap dominated capacitance response as mentioned in this paper.
Journal ArticleDOI
InAs FinFETs With $\textrm {H}_{\mathrm {fin}}=20$ nm Fabricated Using a Top–Down Etch Process
Richard Kenneth Oxland,Xu Li,S. W. Chang,Shyh-Wei Wang,T. Vasen,Peter Ramvall,R. Contreras-Guerrero,J.S. Rojas-Ramirez,Martin Christopher Holland,Gerben Doornbos,Chang Yen-An,Douglas Macintyre,Stephen Thoms,R. Droopad,Yee-Chia Yeo,Carlos H. Diaz,I.G. Thayne,Matthias Passlack +17 more
TL;DR: In this paper, the first InAs FinFETs with fin width in the range 25-35 nm, formed by inductively coupled plasma etching, were presented, where the fin width was controlled by the use of an etch stop layer incorporated into the heterostructure.
Journal ArticleDOI
A Novel Method of MOSFET Series Resistance Extraction Featuring Constant Mobility Criteria and Mobility Universality
TL;DR: In this article, a method of series resistance extraction for MOSFETs is proposed, which relies on the constant mobility criteria, while for different gate lengths, it preserves the shape of universal mobility curves in the high-vertical-field regime.
Journal ArticleDOI
Novel single-poly EEPROM with damascene control-gate structure
TL;DR: In this article, a single-poly EEPROM using damascene control gate (CG) structure is presented, which can perform the program and erase function with a voltage less than 6.5 V.