scispace - formally typeset
I

Ivan Kostic

Researcher at Slovak Academy of Sciences

Publications -  151
Citations -  1168

Ivan Kostic is an academic researcher from Slovak Academy of Sciences. The author has contributed to research in topics: Resist & Electron-beam lithography. The author has an hindex of 17, co-authored 147 publications receiving 1094 citations. Previous affiliations of Ivan Kostic include University of Kassel.

Papers
More filters
Journal ArticleDOI

Thermally driven microgripper as a tool for micro assembly

TL;DR: In this article, a thermally actuated micro gripper was designed and fabricated from single crystal bulk silicon with a gripping width of 5mm for 5-6V driving voltage at a current of 50-60mA.
Journal ArticleDOI

Scanning proximal probes for parallel imaging and lithography

TL;DR: In this article, a massively parallel cantilever-probe platform is demonstrated, with 128 self-sensing and self-actuated proximal probes and readout based on piezoresistive sensors and bending control based on bimorph dc/ac actuations.
Journal ArticleDOI

MgB2 superconducting thin films on Si and Al2O3 substrates

TL;DR: In this paper, the authors showed the possibility to synthesize nanocrystalline superconducting MgB 2 thin films on silicon substrate with critical temperature near 39 K, prepared by vacuum co-deposition of boron and magnesium films.
Journal ArticleDOI

Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

TL;DR: In this article, a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is characterized by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively.