Journal ArticleDOI
Scanning proximal probes for parallel imaging and lithography
K. Ivanova,Y. Sarov,Tzv. Ivanov,Andreas Frank,Jens-Peter Zöllner,Ch. Bitterlich,U. Wenzel,B. E. Volland,S. Klett,Ivo W. Rangelow,P. Zawierucha,M. Zielony,Teodor Gotszalk,D. Dontzov,Walter Schott,N. Nikolov,M. Zier,Bernd Schmidt,Wolfgang Engl,Thomas Sulzbach,Ivan Kostic +20 more
TLDR
In this article, a massively parallel cantilever-probe platform is demonstrated, with 128 self-sensing and self-actuated proximal probes and readout based on piezoresistive sensors and bending control based on bimorph dc/ac actuations.Abstract:
Scanning proximity probes are uniquely powerful tools for analysis, manipulation, and bottom-up synthesis. A massively parallel cantilever-probe platform is demonstrated. 128 self-sensing and self-actuated proximal probes are discussed. Readout based on piezoresistive sensors and bending control based on bimorph dc/ac actuations are described in detail.read more
Citations
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Journal ArticleDOI
Review of Electrothermal Actuators and Applications
Alissa Potekhina,Changhai Wang +1 more
TL;DR: A review of electrothermal micro-actuators and applications is presented in this paper, where the three main configurations of electro-thermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph.
Journal ArticleDOI
Review of scanning probe micromachining and its applications within nanoscience
Thomas Michels,Ivo W. Rangelow +1 more
TL;DR: In this article, a review of cantilever design and fabrication for shear-force/mass-detection/IR-sensitive/combination of STM and AFM is presented.
Journal ArticleDOI
Tip-Based Nanofabrication for Scalable Manufacturing
TL;DR: In this article, the authors introduce the history of the tip-based nanofabrication (TBN) and the technology development and briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-theart techniques.
Journal ArticleDOI
Comparison of technologies for nano device prototyping with a special focus on ion beams: A review
TL;DR: In this paper, a review of application results patterned similarly to those in the semiconductor industry (for cell phone, computer processors, or memory) for nano device prototyping is presented.
Journal ArticleDOI
Nanolithography by scanning probes on calixarene molecular glass resist using mix-and-match lithography
TL;DR: In this paper, a combination of electron beam lithography (EBL) with the outstanding capabilities of closed-loop electric field current-controlled scanning probe nanolithography (SPL) is demonstrated.
References
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Journal ArticleDOI
Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
B. W. Chui,T. D. Stowe,Yongho Sungtaek Ju,Kenneth E. Goodson,Thomas W. Kenny,Harry Jonathon Mamin,Bruce D. Terris,R.P. Ried,Daniel Rugar +8 more
TL;DR: In this paper, single-crystal silicon cantilevers with integrated piezoresistive sensors were fabricated with measured sensitivities /spl Delta/R/R up to 7.5/spl times/10/sup -7/ per /spl Aring/ in close agreement with theoretical predictions.