Journal ArticleDOI
300 mm ruling engine producing gratings and echelles under interferometric control in China
Xiaotian Li,Yu Haili,Xiangdong Qi,Shulong Feng,Jicheng Cui,Shanwen Zhang,Jirigalantu,Yuguo Tang +7 more
TLDR
In this paper, a new ruling tool carriage system and its driving mechanism for a 300mm ruling engine producing gratings and echelles under interferometric control (CIOMP-2) are presented.Abstract:
The designs of 300 mm ruling engine producing gratings and echelles under interferometric control (CIOMP-2) are presented. A new ruling-tool carriage system and its driving mechanism—which are easy to manufacture—are proposed. A new blank carriage system, controlled by a dual-frequency laser interferometer and a piezoelectric actuator, is designed. The CIOMP-2 ruling engine can now rule grating blanks with dimensions up to 300 mm×300 mm, and mainly rules gratings with grating constants between 10 and 2400 lines/mm. The wavelength range of CIOMP-2 gratings is from ultraviolet to mid-infrared wavelengths. Experiments show that the new ruling-tool carriage system works well and stability of motion is improved with the help of a flexure-hinge structure, and the threefold standard deviation values of the blank carriage positioning errors are less than ∼5 nm. For 600 line/mm gratings (diffraction order m=−1), the scatter intensities and ghosts reach 10−5 of the maximum intensity. The scatter intensities and ghost of gratings ruled with CIOMP-2 are low, and no Rowland ghosts are visible. The gratings ruled by CIOMP-2 have high diffraction efficiency and resolving power. CIOMP-2 can also produce varied-line-space, bend-line, and aberration-reducing gratings and echelles.read more
Citations
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Journal ArticleDOI
Groove shape characteristics of echelle gratings with high diffraction efficiency
TL;DR: In this article, an echelle grating is defined as a grating that contains a series of reflective facets with a specific tilt angle that are located far from the nonworking facet of the grating and have a deep groove depth.
Journal ArticleDOI
Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control.
Mi Xiaotao,Yu Haili,Hongzhu Yu,Shanwen Zhang,Xiaotian Li,Xuefeng Yao,Xiangdong Qi,Bayinhedhig,Qiuhua Wan +8 more
TL;DR: A new ruling-tool carriage system based on aerostatic guideways, a new blank carriage system with double piezoelectric actuators, and a completely closed-loop servo-control system with a new optical measurement system that can control the position of the diamond relative to the blank are proposed.
Journal ArticleDOI
Simple and low-cost nanofabrication process of nanoimprint templates for high-quality master gratings: Friction-induced selective etching
TL;DR: In this paper, a simple and inexpensive fabrication process based on friction-induced selective etching was proposed to obtain high precision and practical master gratings, where the line width/density and micromorphology of grating structures can be effectively controlled by the scratching load and etching time.
Journal ArticleDOI
Ruling engine using adjustable diamond and interferometric control for high-quality gratings and large echelles
TL;DR: The grating ruling results indicate that the proposed concept and the related improvements to the engine significantly improve the accuracy of the CIOMP-6 ruling engine.
Journal ArticleDOI
A Review on Fabrication of Blazed Gratings
TL;DR: In this paper, the physical principles of blazed gratings, specific approaches and the achievements of typical processing methods, including mechanical ruling, holographic ion beam etching, electron beam lithography, wet etching etc.
References
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Journal ArticleDOI
Mechanically ruled aberration-corrected concave gratings
Tatsuo Harada,Toshiaki Kita +1 more
TL;DR: A highly efficient visible-UV monochromator and a coma-type aberration-reduced Seya-Namioka monochromaator have been designed and fabricated using mechanically ruled aberration -corrected concave gratings.
Journal ArticleDOI
Compact high-resolution spaceborne echelle grating spectrometer with acousto-optical tunable filter based order sorting for the infrared domain from 2.2 to 4.3 μm
Dennis Nevejans,Eddy Neefs,Emiel Van Ransbeeck,Sophie Berkenbosch,Roland Clairquin,Lieve De Vos,W. Moelans,Stijn Glorieux,Ann Baeke,Oleg Korablev,I. Vinogradov,Yuri Kalinnikov,Benny Bach,Jean-Pierre Dubois,Eric Villard +14 more
TL;DR: A new compact spaceborne high-resolution spectrometer developed for the European Space Agency's Venus Express spacecraft and designed to obtain an instrument line profile of 0.2 cm(-1) is described.
Journal ArticleDOI
Enhancing precision in fs-laser material processing by simultaneous spatial and temporal focusing
Robert Kammel,Roland Ackermann,Jens Thomas,Jens Thomas,Jörg B. Götte,Stefan Skupin,Andreas Tünnermann,Andreas Tünnermann,Stefan Nolte,Stefan Nolte +9 more
TL;DR: In this article, the authors apply simultaneous spatial and temporal focusing (SSTF) to femtosecond (fs)-lasers for high precision micromachining of transparent materials because nonlinear absorption in the focus can result in refractive index modifications or material disruptions.
Journal ArticleDOI
The Production of Diffraction GratingsI. Development of the Ruling Art
TL;DR: In this article, the development and present status of mechanically controlled ruling engines are discussed, and problems involved in producing on a reflecting surface large numbers of parallel equidistant grooves of constant or controlled form, with position tolerances of one micro-inch or better, are analyzed.
Journal ArticleDOI
Interferometric Control of Grating Ruling with Continuous Carriage Advance
TL;DR: In this paper, a 14-inch ruling engine with interferometer control of grating blank position between ruling strokes has been described, which is now being operated with continuous blank advance and control.