A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems
David C. Roberts,Hanqing Li,J.L. Steyn,Onnik Yaglioglu,S.M. Spearing,Martin A. Schmidt,N.W. Hagood +6 more
TLDR
A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized in this article, which enabled the valve to meet simultaneously a set of high frequency (1 kHz), high pressure (/spl ges/300 kPa) requirements not previously satisfied by other hydraulic flow regulation microvalves.Abstract:
A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40/spl times/-50/spl times/) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency (/spl ges/1 kHz), high pressure(/spl ges/300 kPa), and large stroke (20-30 /spl mu/m) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges are detailed.read more
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