Journal ArticleDOI
A Three-Dimensional Silicon Nitride Polarizing Beam Splitter
Jijun Feng,Ryoichi Akimoto +1 more
TLDR
In this paper, a 3D polarizing beam splitter based on a silicon nitride (Si3N4) vertical directional coupler is experimentally demonstrated, where a new planarization technique by incorporating conventional chemical-mechanical lapping with a dry-etching process is developed, in order to obtain a flat film surface for the second Si3N 4 core deposition after the first-layer waveguide is formed.Abstract:
A 3-D polarizing beam splitter based on a silicon nitride (Si3N4) vertical directional coupler is experimentally demonstrated. A new planarization technique by incorporating conventional chemical-mechanical lapping with a dry-etching process is developed, in order to obtain a flat film surface for the second Si3N4 core deposition after the first-layer waveguide is formed. Both the Si3N4 layer thicknesses are 200 nm. As there is a material refractive index mismatch between the vertically separated waveguides, the polarization splitter can be realized with a bottom waveguide width of 1.55 μm and a top core width of 1.35 μm. The transverse electric (TE) polarized light can be transmitted completely to the cross-layer output-port, whereas the transverse magnetic (TM) polarized wave outputs mostly from the port at the input layer. A high-extinction ratio and a wide operation bandwidth can be achieved. An extinction ratio of 26 dB for the cross-layer output-port at 1550-nm wavelength and that of 16 dB for the input-layer output-port are obtained. There is an excess coupling loss of for the TE light, but a 1-dB loss for the TM wave.read more
Citations
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Journal ArticleDOI
Multilayer graphene electro-absorption optical modulator based on double-stripe silicon nitride waveguide.
TL;DR: A graphene electro-absorption optical modulator based on double-stripe silicon nitride waveguide and the graphene layers co-electrode design is proposed and analyzed, which can remedy the lack of high speed modulator on the passive silicon nitrite waveguide.
Journal ArticleDOI
Multi-level single mode 2D polymer waveguide optical interconnects using nano-imprint lithography
Muhammad Umar Khan,John Justice,Jarno Petäjä,Tia Korhonen,Arjen Boersma,S. Wiegersma,Mikko Karppinen,Brian Corbett +7 more
TL;DR: Single and multi-layer passive optical interconnects using single mode polymer waveguides are demonstrated using UV nano-imprint lithography and a way to experimentally quantify a small variation in index contrast between core and cladding of fabricated devices is shown.
Journal ArticleDOI
Asymmetric Silicon Slot-Waveguide-Assisted Polarizing Beam Splitter
TL;DR: In this paper, a silicon polarizing beam splitter is designed and fabricated based on an asymmetric slot waveguide structure without adopting additional strip-slot waveguide mode converters, which can realize a transverse magnetic light cross-coupling with a 392-nm wide strip waveguide, while little transverse electric light coupling can happen.
Journal ArticleDOI
Silicon nitride polarizing beam splitter with potential application for intersubband-transition-based all-optical gate device
Jijun Feng,Ryoichi Akimoto +1 more
TL;DR: In this article, the authors presented the design, fabrication, and characterization of a silicon nitride polarizing beam splitter, which has potential applications in an all-optical gate device based on an intersubband-transition-induced cross-phase modulation.
Journal ArticleDOI
Vertically Coupled Silicon Nitride Microdisk Resonant Filters
Jijun Feng,Ryoichi Akimoto +1 more
TL;DR: Polarization-dependent vertically coupled microdisk resonant filters are experimentally demonstrated based on a multilayer silicon nitride platform in this article, where an improved planarization technique based on conventional chemical-mechanical polishing and dry-etching is adopted to flatten the gap film surface for a different core layer deposition after the first-layer photonic circuit is formed.
References
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Journal ArticleDOI
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