Journal ArticleDOI
A wireless batch sealed absolute capacitive pressure sensor
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TLDR
In this article, an absolute wireless pressure sensor that consists of a capacitive sensor and a gold-electroplated planar coil is presented, where applied pressure deflects a 6-μm-thin silicon diaphragm, changing the capacitance formed between it and a metal electrode supported on a glass substrate.Abstract:
This paper reports the development of an absolute wireless pressure sensor that consists of a capacitive sensor and a gold-electroplated planar coil. Applied pressure deflects a 6 μm-thin silicon diaphragm, changing the capacitance formed between it and a metal electrode supported on a glass substrate. The resonant frequency of the LC circuit formed by the capacitor and the inductor changes as the capacitance changes; this change is sensed remotely through inductive coupling, eliminating the need for wire connection or implanted telemetry circuits. The sensor is fabricated using the dissolved-wafer process and utilizes a boron-doped silicon diaphragm supported on an insulating glass substrate. The complete sensor measures 2.6 mm ×1.6 mm in size and incorporates a 24-turns gold-electroplated coil that has a measured inductance of 1.2 μH. The sensor is designed to provide a resonant frequency change in the range 95–103 MHz for a pressure change in the range 0–50 mmHg with respect to ambient pressure, providing a pressure responsivity and sensitivity of 160 kHz/mmHg and 1553 ppm/mmHg, respectively. The measured pressure responsivity and sensitivity of the fabricated device are 120 kHz/mmHg and 1579 ppm/mmHg, respectively.read more
Citations
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Advances of flexible pressure sensors toward artificial intelligence and health care applications
TL;DR: This review focuses on the fundamentals of flexible pressure sensors, and subsequently on several critical concepts for the exploration of functional materials and optimization of sensing devices toward practical applications.
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Microfabricated Implantable Parylene-Based Wireless Passive Intraocular Pressure Sensors
TL;DR: An implantable parylene-based wireless pressure sensor for biomedical pressure sensing applications specifically designed for continuous intraocular pressure (IOP) monitoring in glaucoma patients is presented in this article.
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3D-printed microelectronics for integrated circuitry and passive wireless sensors
TL;DR: This work establishes an innovative approach to construct arbitrary 3D systems with embedded electrical structures as integrated circuitry for various applications, including the demonstrated passive wireless sensors.
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Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant
TL;DR: In this paper, an implantable parylene-based pressure sensor has been developed, featuring an electrical LC-tank resonant circuit for passive wireless sensing without power consumption on the implanted site.
References
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Journal ArticleDOI
A single-channel implantable microstimulator for functional neuromuscular stimulation
TL;DR: The single-channel implantable microstimulator device measures 2/spl times/2/ spl times/10 mm/sup 3/ and can be inserted into paralyzed muscle groups by expulsion from a hypodermic needle.
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An ultraminiature solid-state pressure sensor for a cardiovascular catheter
Hin-Leung Chau,Kensall D. Wise +1 more
TL;DR: An ultraminiature solid-state capacitive pressure sensor that can be mounted in a 0.5mm OD catheter suitable for multipoint pressure measurements from within the coronary artery of the heart is described in this paper.
Journal ArticleDOI
Linking sensors with telemetry: impact on the system design
TL;DR: Typical aspects in the design of telemetry systems are focused on, such that sensor interfacing, signal processing, data handling and data transmission also become key parameters in the total system design.
Journal ArticleDOI
Hermetically Sealed Inductor-Capacitor (LC) Resonator for Remote Pressure Monitoring
TL;DR: In this article, an integrated inductor-capacitor (LC) resonator structure fabricated using bulk micromachining and anodic bonding technologies was presented for biomedical applications such as intraocular, cardiovascular and brain pressure monitoring.