Journal ArticleDOI
Air curtain application in a purged unified pod
TLDR
In this article, the authors employed an air curtain to prevent moisture entering into a purged front-opening unified-pod (FOUP) when its door is opened in a minienvironment.About:
This article is published in Applied Thermal Engineering.The article was published on 2017-01-25. It has received 14 citations till now. The article focuses on the topics: FOUP & Moisture.read more
Citations
More filters
Journal ArticleDOI
Parametric study on the performance of an air curtain based on CFD simulations - New proposal for automatic operation
TL;DR: In this paper, a parametric study on the performance of an air curtain installed over an access door of a refrigerated room is presented, which quantifies the influence of the following geometrical and dynamic parameters: door height, temperature difference between rooms, nozzle thickness, initial orientation angle, and jet discharge velocity.
Journal ArticleDOI
Review—Airborne Molecular Contamination: Recent Developments in the Understanding and Minimization for Advanced Semiconductor Device Manufacturing
Journal ArticleDOI
Analysis of FDS 6 Simulation Results for Planar Air Curtain Related Flows from Straight Rectangular Ducts
TL;DR: In this paper, the impact of the inlet boundary condition on the flow field in the near-field region is discussed for jet flows through a straight square duct, which is an interesting configuration in the context of air curtain flows for smoke and heat control in buildings in case of fire.
Journal ArticleDOI
Moisture Prevention in a Pre-Purged Front-Opening Unified Pod (FOUP) During Door Opening in a Mini-Environment
TL;DR: In this article, the authors examined moisture evolution in a pre-purged unified pod with an open door in a mini-environment, and compared the performance of a conventional purge method and air curtains of different widths.
Journal ArticleDOI
Experimental study of nanoparticle transport and penetration efficiency on a sharp-bent tube (elbow connection)
TL;DR: In this article, the penetration efficiency of a sharp-bent tube was investigated by using a particle size ranging from 3 to 50 nm. And the particle size and flow rate significantly affected the penetration performance.
References
More filters
Journal ArticleDOI
Firefly Algorithm for Explicit B-Spline Curve Fitting to Data Points
TL;DR: This paper introduces a new method to compute the approximating explicit B-spline curve to a given set of noisy data points by applying the firefly algorithm, a powerful metaheuristic nature-inspired algorithm well suited for optimization.
Journal ArticleDOI
Reducing airborne molecular contamination by efficient purging of FOUPs for 300-mm wafers-the influence of materials properties
TL;DR: In this article, a front opening unified pod (FOUP), a wafer box for 300mm wafers, is purged with inert gas and different parameters for the purge process are evaluated experimentally.
Journal ArticleDOI
Requirements for contamination control in the gigabit era
H. Kitajima,Y. Shiramizu +1 more
TL;DR: In this paper, the effect of contamination, especially particles and organic materials in cleanrooms, on future device manufacturing was estimated and the number of particles deposited on wafer surfaces was calculated based on particle size distribution in real cleanrooms and the reported data on particle deposition velocity.
Journal ArticleDOI
Identification and quantification of FOUP molecular contaminants inducing defects in integrated circuits manufacturing
TL;DR: In this paper, two cases related with defects induced by molecular contamination, namely crystal growth and corrosion issues, were presented along two process sequences: (1) copper interconnect patterning and (2) Ionic Implantation of N-type or P-type dopants before Spacer Deposition.
Patent
Method of processing an object in a container and lid opening/closing system used in the method
TL;DR: In this paper, a gas curtain from purge gas above the top side of an opening portion of an FIMS is used for purging the interior of the pod by the lid 4.