CMOS SPADs with up to 500 μm diameter and 55% detection efficiency at 420 nm

TLDR: In this paper, the authors developed silicon SPADs with active area diameters as large as 500μm in a fully standard CMOS process, which can be used with on-chip integrated quenching circuitry to reduce the afterpulsing probability, or with external circuits to achieve even better photon-timing performances.

Abstract: Many demanding applications require single-photon detectors with very large active area, very low noise, high detection efficiency, and precise time response. Single-photon avalanche diodes (SPADs) provide all the advantages of solid-state devices, but in many applications other single-photon detectors, like photomultiplier tubes, have been preferred so far due to their larger active area. We developed silicon SPADs with active area diameters as large as 500 μm in a fully standard CMOS process. The 500 μm SPAD exhibits 55% peak photon detection efficiency at 420 nm, 8 kcps of dark counting rate at 0°C, and high uniformity of the sensitivity in the active area. These devices can be used with on-chip integrated quenching circuitry, which reduces the afterpulsing probability, or with external circuits to achieve even better photon-timing performances, as good as 92 ps FWHM for a 100 μm diameter SPAD. Owing to the state-of-the-art performance, not only compared to CMOS SPADs but also SPADs developed in custom...