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Colloquium: Reactive plasmas as a versatile nanofabrication tool

Kostya Ostrikov
- 22 Jun 2005 - 
- Vol. 77, Iss: 2, pp 489-511
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TLDR
In this article, the benefits and challenges of using plasma-based systems in nanofabrication of nanostructured silicon films, low-dimensional semiconducting quantum structures, ordered carbon nanotip arrays, highly crystalline ${\mathrm{TiO}}_{2}$ coatings, and nano-structured hydroxyapatite bioceramics are discussed.
Abstract
The underlying physics of the application of low-temperature, low-pressure reactive plasmas in various nanoassembly processes is described. From the viewpoint of the ``cause and effect'' approach, this Colloquium focuses on the benefits and challenges of using plasma-based systems in nanofabrication of nanostructured silicon films, low-dimensional semiconducting quantum structures, ordered carbon nanotip arrays, highly crystalline ${\mathrm{TiO}}_{2}$ coatings, and nanostructured hydroxyapatite bioceramics. Other examples and future prospects of plasma-aided nanofabrication are also discussed.

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Reactive species in non-equilibrium atmospheric-pressure plasmas: Generation, transport, and biological effects

TL;DR: In this paper, the most important mechanisms of generation and transport of the key species in the plasmas of atmospheric-pressure plasma jets and other non-equilibrium atmospheric pressure plasms are introduced and examined from the viewpoint of their applications in plasma hygiene and medicine and other relevant fields.
Journal ArticleDOI

Dynamics of an atmospheric pressure plasma plume generated by submicrosecond voltage pulses

TL;DR: In this paper, a model based on photoionization is used to explain the propagation kinetics of the plasma bullet under low electric field conditions, showing that the plume is in fact a small bullet-like volume of plasma traveling at unusually high velocities.
Journal ArticleDOI

Microplasmas for nanomaterials synthesis

TL;DR: Microplasmas have attracted a tremendous amount of interest from the plasma community because of their small physical size, stable operation at atmospheric pressure, non-thermal characteristics, high electron densities and non-Maxwellian electron energy distributions as discussed by the authors.
Journal ArticleDOI

Plasma nanoscience: from nano-solids in plasmas to nano-plasmas in solids

TL;DR: The unique plasma-specific features and physical phenomena in the organization of nanoscale soild-state systems in a broad range of elemental composition, structure, and dimensionality are critically reviewed in this paper.
Journal ArticleDOI

Plasma Nanoscience: from Nano-Solids in Plasmas to Nano-Plasmas in Solids

TL;DR: In this paper, a unified conceptual framework based on the control of production, transport, and self-organization of precursor species is introduced and a variety of plasma-specific non-equilibrium and kinetics-driven phenomena across the many temporal and spatial scales is explained.
References
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Journal ArticleDOI

Helical microtubules of graphitic carbon

Sumio Iijima
- 01 Nov 1991 - 
TL;DR: Iijima et al. as mentioned in this paper reported the preparation of a new type of finite carbon structure consisting of needle-like tubes, which were produced using an arc-discharge evaporation method similar to that used for fullerene synthesis.
Book

Principles of Plasma Discharges and Materials Processing

TL;DR: In this paper, the authors introduce the concept of particle and energy balance in discharges and introduce the theory of collision dynamics and wave-heated discharges, as well as chemical reactions and equilibrium.
Journal ArticleDOI

Cobalt-catalysed growth of carbon nanotubes with single-atomic-layer walls

TL;DR: In this paper, it was shown that covaporizing carbon and cobalt in an arc generator leads to the formation of carbon nanotubes which all have very small diameters (about 1.2 nm) and walls only a single atomic layer thick.
Journal ArticleDOI

Atomic-scale imaging of carbon nanofibre growth

TL;DR: Time-resolved, high-resolution in situ transmission electron microscope observations of the formation of carbon nanofibres from methane decomposition over supported nickel nanocrystals show that metallic step edges act as spatiotemporal dynamic growth sites and may be important for understanding other types of catalytic reactions and nanomaterial syntheses.
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