Journal ArticleDOI
Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator
Reads0
Chats0
TLDR
In this article, a comprehensive thermal model for an electro-thermal-compliant (ETC) microactuator is presented, which accounts for all modes of heat dissipation and the temperature dependence of thermophysical and heat transfer properties.Abstract:
A comprehensive thermal model for an electro-thermal-compliant (ETC) microactuator is presented in this paper. The model accounts for all modes of heat dissipation and the temperature dependence of thermophysical and heat transfer properties. The thermal modelling technique underlying the microactuator model is general and can be used for the virtual testing of any ETC device over a wide range of temperatures (300-1500 K). The influence of physical size and thermal boundary conditions at the anchors, where the device is connected to the substrate, on the behaviour of an ETC microactuator is studied by finite element simulations based on the comprehensive thermal model. Simulations show that the performance ratio of the microactuator increased by two orders of magnitude when the characteristic length of the device was increased by one order of magnitude from 0.22 to 2.2 mm. Restricting heat loss to the substrate via the device anchors increased the actuator stroke by 66% and its energy efficiency by 400%, on average, over the temperature range of 300-1500 K. An important observation made is that the size of the device and thermal boundary conditions at the device anchor primarily control the stroke, operating temperature and performance ratio of the microactuator for a given electrical conductivity.read more
Citations
More filters
Journal ArticleDOI
Electrothermally activated SU-8 microgripper for single cell manipulation in solution
Nikos Chronis,Luke P. Lee +1 more
TL;DR: In this paper, the SU-8-based micro gripper that can operate in physiological ionic solutions is presented, which consists of two "hot-and-cold" arm actuators that are fabricated in a two-mask surface micromachining process.
Journal ArticleDOI
A thermal actuator for nanoscale in situ microscopy testing: design and characterization
TL;DR: In this paper, the design and optimization of thermal actuators employed in a novel MEMS-based material testing system is addressed and analytical expressions of the actuator thermomechanical response are derived and discussed.
Journal ArticleDOI
Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator
TL;DR: In this paper, the authors describe the development and experimental validation of a finite-difference thermal model of a thermomechanical in-plane microactuator (TIM).
Journal ArticleDOI
Electrothermal properties and modeling of polysilicon microthermal actuators
TL;DR: In this paper, the authors address a range of issues on modeling electrothermal microactuators, including the physics of temperature dependent material properties and Finite Element Analysis (FEA) modeling techniques.
Journal ArticleDOI
Micromechanical devices with embedded electro-thermal-compliant actuation
TL;DR: In this article, the authors highlight another advantage of thermal actuation, viz. the ease with which it can be utilized to achieve a novel embedded electro-thermal-compliant (ETC) actuation for MEMS.
References
More filters
Journal ArticleDOI
Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K
Yasumasa Okada,Yozo Tokumaru +1 more
TL;DR: In this paper, the lattice parameter of high-purity silicon is measured as a function of temperature between 300 and 1500 K, and the linear thermal expansion coefficient is accurately determined.
Book
Thermophysical properties of high temperature solid materials
TL;DR: In this paper, a general description is given of the format and method of presenting data, methods and techniques for the collection, evaluation, processing, and retrieval of information in the preparation of the work entitled, "Thermophysical Properties of High Temperature Solid Materials".
Journal ArticleDOI
Theory of Radiative Heat Transfer between Closely Spaced Bodies
D. Polder,M. A. Van Hove +1 more
TL;DR: In this article, a general formalism is developed by means of which the radiative heat transfer between macroscopic bodies of arbitrary dispersive and absorptive dielectric properties can be evaluated.
Book
Basic Heat and Mass Transfer
TL;DR: In this article, the authors present an overview of the properties of elementary heat transfer, including the following: 1. Introduction and Elementary Heat Transfer 2. Steady One-Dimensional Heat Conduction 3. Multidimensional and Unsteady Conduction.
Journal ArticleDOI
Analysis and design of polysilicon thermal flexure actuator
TL;DR: In this paper, an analytical model that can accurately predict the performance of a polysilicon thermal flexure actuator has been developed, based on an electrothermal analysis of the actuator, incorporating conduction heat transfer.