Designing and Fabricating MEMS Cantilever Switches

TLDR: In this paper, the authors discussed the process by which the MEMS Switches were designed and fabricated, and explained the changes in the switches when issues called for a modification to devices.

Abstract: In this thesis, MEMS switches actuated using electrostatic actuation is explored. MEMS switches that are lateral switches and clamped-clamped switches are designed, fabricated, and tested in this thesis. This thesis extensively explains the process by which the MEMS Switches were designed and fabricated. In addition, it explains the changes in the switches when issues called for a modification to devices. Contact resistances were extensively studied, in this thesis. There has been a trade-off between the reliability of switches and their contact resistances. Many actions were taken to mitigate this trade-off and to allow both reliable devices with low contact resistances. The efforts to do so ranged from thermal oxidation to reduce the scalloping on the sidewalls, to modifying the dry etching recipe, to modifying the sputtering recipe, to electroplating, and many more. However, reliability of the MEMS Lateral switches was accomplished independent to the contact resistances. In addition, low contact resistances were accomplished independent to reliability. A novel approach to designing clamped-clamped MEMS switches is also showcased in this thesis. These devices experienced unique challenges compared to those faced with lateral switches. Both lateral and clamped-clamped switches are discussed in-depth in this thesis.