Journal ArticleDOI
Dynamics of a collisional, capacitive RF sheath
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In this paper, a self-consistent solution for the dynamics of a high-voltage, capacitive RF sheath driven by a sinusoidal current source is obtained, under the assumptions of time-independent, collisional ion motion and inertialess electrons.Abstract:
A self-consistent solution for the dynamics of a high-voltage, capacitive RF sheath driven by a sinusoidal current source is obtained, under the assumptions of time-independent, collisional ion motion and inertialess electrons. Values of the ion current density, the sheath capacitance per unit area for the fundamental voltage harmonic, and the conductance per unit area for stochastic heating by the oscillating sheath are calculated. The ratio of the DC to the peak value of the oscillating voltage is found to be 0.40, while the second and third voltage harmonics are, respectively, 19.3% and 5.3% of the fundamental. >read more
Citations
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Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source
TL;DR: In this paper, an atmospheric pressure plasma jet (APPJ) operates using rf power and produces a stable homogeneous discharge at atmospheric pressure, which is divided into two regimes, a "normal" operating mode when the discharge is stable and homogeneous, and a "failure" mode when it converts into a filamentary arc.
Journal ArticleDOI
Particle simulations of radio-frequency glow discharges
TL;DR: In this paper, particle-in-cell simulations are used to study the structure of radiofrequency glow discharges in helium between parallel-plate electrodes, and the authors have examined a range of conditions and report on a variety of observed phenomena.
Journal ArticleDOI
From Fermi acceleration to collisionless discharge heating
TL;DR: In this article, Fermi acceleration is used as a paradigm to describe collisionless heating and phase randomization in capacitive, inductive, and electron cyclotron resonance (ECR) discharges.
Journal ArticleDOI
Electrical characteristics of parallel-plate RF discharges in argon
TL;DR: In this paper, the discharge voltage, current, and phase shift between them were measured over a very wide range of discharge parameters (gas pressures between 3 mtorr and 3 torr with discharge power between 20 mW and 100 W).
Journal ArticleDOI
Levitation of dust in rf and dc glow discharges
Abstract: We have examined the dynamics of dust in collisionless and collisional electrode sheaths of dc and rf glow discharges. The charge of the dust particles, the various forces, oscillation frequencies, damping effects and energy potential extrema are calculated. In the rf sheaths the dust particle charge is negative in the whole sheath, while in the dc sheaths the dust particle charge is positive in a major part of the sheath. Collection of dust leads to changes in the dust and plasma potentials and to a reduction in the maximum dust particle size that can be levitated. Close to the electrode there will be a dust-free zone.
References
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Journal ArticleDOI
On the Origin of the Cosmic Radiation
TL;DR: In this paper, a theory of the origin of cosmic radiation is proposed according to which cosmic rays are originated and accelerated primarily in the interstellar space of the galaxy by collisions against moving magmetic fields.
Journal ArticleDOI
Analytical solution for capacitive RF sheath
TL;DR: In this paper, a self-consistent solution for the dynamics of a high voltage, capacitive radio frequency (RF) sheath driven by a sinusoidal current source is obtained under the assumptions of time-independent, collisionless ion motion and inertialess electrons.
Journal ArticleDOI
Application of RF discharges to sputtering
H. R. Koenig,Leon I Maissel +1 more
TL;DR: In this paper, the operation of rf discharges is described and the internal distribution of voltages is considered, and the significance of this with respect to sputtering, particularly of insulators, is then discussed.
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Mechanisms for Power Deposition in Ar/SiH4 Capacitively Coupled RF Discharges
TL;DR: In this article, the authors discuss the method of power deposition by electrons and the spatial dependence of electron-impact excitation rates in low-pressure capacitively coupled RF discharges with results from a Monte Carlo plasma simulation code.
Journal ArticleDOI
Power dissipated in low‐pressure radio‐frequency discharge plasmas
O. A. Popov,Valery Godyak +1 more
TL;DR: In this paper, the experimental study of capacitive radio-frequency discharges was performed in mercury vapor at low pressures (10−4−10−2 Torr) and at rf applied voltage below 200 V.