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Journal ArticleDOI

Effects of the substrate on the determination of thin film mechanical properties by nanoindentation

Ranjana Saha, +1 more
- 08 Jan 2002 - 
- Vol. 50, Iss: 1, pp 23-38
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TLDR
In this paper, the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation were examined, and the properties of aluminum and tungsten films on the following substrates: aluminum, glass, silicon and sapphire.
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This article is published in Acta Materialia.The article was published on 2002-01-08. It has received 1410 citations till now. The article focuses on the topics: Nanoindentation & Elastic modulus.

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Citations
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Can micro-compression testing provide stress-strain data for thin films?A comparative study using Cu, VN, TiN and W coatings

TL;DR: In this article, focused ion beam milling is employed to fabricate micron-sized compression pillars from 1µm thick single crystal Cu, TiN, and VN(001) films grown on MgO(001), and from a polycrystalline W coating deposited on Si(001).
Journal ArticleDOI

Finite element and dimensional analysis algorithm for the prediction of mechanical properties of bulk materials and thin films

TL;DR: In this article, the applicability of a new algorithm for the estimation of mechanical properties from instrumented indentation data was studied for thin films with the aid of both three-dimensional finite element simulations and experimental indentation tests.
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Mo Ru coatings on tungsten carbide by direct current magnetron sputtering

TL;DR: In this paper, the surface hardness of the Mo-Ru films was measured by nanoindentation testing, and the grain size was evaluated by X-ray diffractometry.
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Synthesis of transparent and hard SiOC(−H) thin films on polycarbonate substrates by PECVD method

TL;DR: In this article, SiOC(−H) thin films were synthesized from a mixture of trimethylsilane and O2 gases with various mixture ratios by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method and the characteristics of the films such as transparency, hardness and chemical bonding were investigated as a function of the mixture ratio.
References
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Journal ArticleDOI

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

TL;DR: In this paper, the authors used a Berkovich indenter to determine hardness and elastic modulus from indentation load-displacement data, and showed that the curve of the curve is not linear, even in the initial stages of the unloading process.
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The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile

TL;DR: In this article, a solution of the axisymmetric Boussinesq problem is derived from which are deduced simple formulae for the depth of penetration of the tip of a punch of arbitrary profile and for the total load which must be applied to the punch to achieve this penetration.
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Indentation size effects in crystalline materials: A law for strain gradient plasticity

TL;DR: In this article, the indentation size effect for crystalline materials can be accurately modeled using the concept of geometrically necessary dislocations, which leads to the following characteristic form for the depth dependence of the hardness: H H 0 1+ h ∗ h where H is the hardness for a given depth of indentation, h, H 0 is a characteristic length that depends on the shape of the indenter, the shear modulus and H 0.
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Mechanism-based strain gradient plasticity— I. Theory

TL;DR: In this paper, a mechanism-based theory of strain gradient plasticity is proposed based on a multiscale framework linking the microscale notion of statistically stored and geometrically necessary dislocations to the mesoscale notion of plastic strain and strain gradient.
Journal ArticleDOI

Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques

TL;DR: In this article, the authors used finite element simulation of conical indentation of a wide variety of elastic-plastic materials to investigate the influences of pileup on the accuracy with which hardness and elastic modulus can be measured by load and depth-sensing indentation techniques.
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