Journal ArticleDOI
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
Ranjana Saha,William D. Nix +1 more
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In this paper, the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation were examined, and the properties of aluminum and tungsten films on the following substrates: aluminum, glass, silicon and sapphire.About:
This article is published in Acta Materialia.The article was published on 2002-01-08. It has received 1410 citations till now. The article focuses on the topics: Nanoindentation & Elastic modulus.read more
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Can micro-compression testing provide stress-strain data for thin films?A comparative study using Cu, VN, TiN and W coatings
Gerhard Dehm,Gerhard Dehm,H. P. Wörgötter,Sophie Cazottes,J. M. Purswani,Daniel Gall,Christian Mitterer,Daniel Kiener +7 more
TL;DR: In this article, focused ion beam milling is employed to fabricate micron-sized compression pillars from 1µm thick single crystal Cu, TiN, and VN(001) films grown on MgO(001), and from a polycrystalline W coating deposited on Si(001).
Journal ArticleDOI
Tribo-mechanical features of nitride coatings and diffusion layers produced by cathodic cage technique on martensitic and supermartensitic stainless steels
Bruna C.E.S. Kurelo,Gelson B. de Souza,Silvio Luiz Rutz da Silva,Natália de Freitas Daudt,Clodomiro Alves,Ricardo D. Torres,Francisco C. Serbena +6 more
TL;DR: In this paper, the mechanical and tribological properties of martensitic AISI 420 (MSS) and supermartensitic HP13Cr (SMSS) stainless steels were investigated.
Journal ArticleDOI
Finite element and dimensional analysis algorithm for the prediction of mechanical properties of bulk materials and thin films
Sara Aida Rodríguez Pulecio,Sara Aida Rodríguez Pulecio,María Cristina Moré Farias,Roberto Martins de Souza +3 more
TL;DR: In this article, the applicability of a new algorithm for the estimation of mechanical properties from instrumented indentation data was studied for thin films with the aid of both three-dimensional finite element simulations and experimental indentation tests.
Journal ArticleDOI
Mo Ru coatings on tungsten carbide by direct current magnetron sputtering
TL;DR: In this paper, the surface hardness of the Mo-Ru films was measured by nanoindentation testing, and the grain size was evaluated by X-ray diffractometry.
Journal ArticleDOI
Synthesis of transparent and hard SiOC(−H) thin films on polycarbonate substrates by PECVD method
Mayui Noborisaka,Hideyuki Kodama,So Nagashima,Akira Shirakura,Takahiro Horiuchi,Tetsuya Suzuki +5 more
TL;DR: In this article, SiOC(−H) thin films were synthesized from a mixture of trimethylsilane and O2 gases with various mixture ratios by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method and the characteristics of the films such as transparency, hardness and chemical bonding were investigated as a function of the mixture ratio.
References
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Journal ArticleDOI
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
Warren C. Oliver,George M. Pharr +1 more
TL;DR: In this paper, the authors used a Berkovich indenter to determine hardness and elastic modulus from indentation load-displacement data, and showed that the curve of the curve is not linear, even in the initial stages of the unloading process.
Journal ArticleDOI
The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile
TL;DR: In this article, a solution of the axisymmetric Boussinesq problem is derived from which are deduced simple formulae for the depth of penetration of the tip of a punch of arbitrary profile and for the total load which must be applied to the punch to achieve this penetration.
Journal ArticleDOI
Indentation size effects in crystalline materials: A law for strain gradient plasticity
William D. Nix,Huajian Gao +1 more
TL;DR: In this article, the indentation size effect for crystalline materials can be accurately modeled using the concept of geometrically necessary dislocations, which leads to the following characteristic form for the depth dependence of the hardness: H H 0 1+ h ∗ h where H is the hardness for a given depth of indentation, h, H 0 is a characteristic length that depends on the shape of the indenter, the shear modulus and H 0.
Journal ArticleDOI
Mechanism-based strain gradient plasticity— I. Theory
TL;DR: In this paper, a mechanism-based theory of strain gradient plasticity is proposed based on a multiscale framework linking the microscale notion of statistically stored and geometrically necessary dislocations to the mesoscale notion of plastic strain and strain gradient.
Journal ArticleDOI
Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques
Alexei Bolshakov,George M. Pharr +1 more
TL;DR: In this article, the authors used finite element simulation of conical indentation of a wide variety of elastic-plastic materials to investigate the influences of pileup on the accuracy with which hardness and elastic modulus can be measured by load and depth-sensing indentation techniques.
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