scispace - formally typeset
Journal ArticleDOI

Effects of the substrate on the determination of thin film mechanical properties by nanoindentation

Ranjana Saha, +1 more
- 08 Jan 2002 - 
- Vol. 50, Iss: 1, pp 23-38
Reads0
Chats0
TLDR
In this paper, the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation were examined, and the properties of aluminum and tungsten films on the following substrates: aluminum, glass, silicon and sapphire.
About
This article is published in Acta Materialia.The article was published on 2002-01-08. It has received 1410 citations till now. The article focuses on the topics: Nanoindentation & Elastic modulus.

read more

Citations
More filters
Journal ArticleDOI

In-situ stress gradient evolution and texture-dependent fracture of brittle ceramic thin films under external load

TL;DR: In this article, in-situ stress gradient evolution during cracking of TiN films under external load was investigated by grazing-incidence X-ray diffraction using the optimized cos2 α sin2 ψ method.
Journal ArticleDOI

Femtosecond laser rejuvenation of nanocrystalline metals

TL;DR: In this article, femtosecond laser processing was used to generate complex stress states due to ultrafast electronic excitation and subsequent relaxation events in nanocrystalline Al-O and Cu-Zr alloys.
Journal ArticleDOI

Improvement of wear and cavitation–erosion by ALD-deposited LiAlxOy films on an Mg–10Li–0.5Zn alloy

TL;DR: LiAlxOy films with thicknesses of 65-200nm were deposited by the ALD technique on an Mg-10Li-0.5Zn alloy as discussed by the authors, which exhibited properties of low friction coefficient, high hardness/elastic (H/E) ratio, strong adhesion, smooth surface roughness and conformable coverage.
Journal ArticleDOI

Nanoscratch studies of SiGe epitaxial layer damage on the Si substrate

TL;DR: In this article, the wear performance of silicon-germanium (SiGe) epitaxial growth of thin SiGe films was evaluated by using annealing treatments and an atomic force microscopy (AFM) examinations.
Journal ArticleDOI

Nanomechanical and nanotribological behaviors of hafnium boride thin films

TL;DR: In this paper, the annealed multilayer HfB2/HfBN films exhibited an order of magnitude lower wear, compared to the as-deposited ones, making them excellent candidates for low friction and low wear hard coating applications.
References
More filters
Journal ArticleDOI

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

TL;DR: In this paper, the authors used a Berkovich indenter to determine hardness and elastic modulus from indentation load-displacement data, and showed that the curve of the curve is not linear, even in the initial stages of the unloading process.
Journal ArticleDOI

The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile

TL;DR: In this article, a solution of the axisymmetric Boussinesq problem is derived from which are deduced simple formulae for the depth of penetration of the tip of a punch of arbitrary profile and for the total load which must be applied to the punch to achieve this penetration.
Journal ArticleDOI

Indentation size effects in crystalline materials: A law for strain gradient plasticity

TL;DR: In this article, the indentation size effect for crystalline materials can be accurately modeled using the concept of geometrically necessary dislocations, which leads to the following characteristic form for the depth dependence of the hardness: H H 0 1+ h ∗ h where H is the hardness for a given depth of indentation, h, H 0 is a characteristic length that depends on the shape of the indenter, the shear modulus and H 0.
Journal ArticleDOI

Mechanism-based strain gradient plasticity— I. Theory

TL;DR: In this paper, a mechanism-based theory of strain gradient plasticity is proposed based on a multiscale framework linking the microscale notion of statistically stored and geometrically necessary dislocations to the mesoscale notion of plastic strain and strain gradient.
Journal ArticleDOI

Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques

TL;DR: In this article, the authors used finite element simulation of conical indentation of a wide variety of elastic-plastic materials to investigate the influences of pileup on the accuracy with which hardness and elastic modulus can be measured by load and depth-sensing indentation techniques.
Related Papers (5)