Journal ArticleDOI
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
Ranjana Saha,William D. Nix +1 more
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In this paper, the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation were examined, and the properties of aluminum and tungsten films on the following substrates: aluminum, glass, silicon and sapphire.About:
This article is published in Acta Materialia.The article was published on 2002-01-08. It has received 1410 citations till now. The article focuses on the topics: Nanoindentation & Elastic modulus.read more
Citations
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Microstructural evolution of nanoindented Ag/Si thin-film under different annealing temperatures
TL;DR: In this paper, the microstructural evolution of Ag/Si thin-film system via nanoindentation and annealing is investigated, and the results confirm that the annaling temperature has a significant effect on the formation of Ag2Si silicide phase in nanoindented Ag/si thin-filament systems.
Journal ArticleDOI
Residual Stress Effects in Doped Barium Strontium Titanate Thin Films
TL;DR: In this article, the effects of residual stress on acceptor-doped barium strontium titanate (Ba x Sr 1 - x TiO 3 ; BST) thin films were investigated in parallel to the annealing temperature.
Journal ArticleDOI
Nanotribological behavior of ZnO films prepared by atomic layer deposition
Wun Kai Wang,Hua-Chiang Wen,Chun-Hu Cheng,Wu-Ching Chou,Wei Hung Yau,Ching Hua Hung,Chang-Pin Chou +6 more
TL;DR: In this article, the effect of pile-up using the nanoscratch technique under a ramped mode was evaluated. And they suspect that elastic-plastic failure events were related to edge bulging between the groove and film, with elasticplastic deformation attributable to adhesion discontinuities and/or cohesion failure of ZnO films.
Journal ArticleDOI
Structural evolution of La-Cr-O thin film: Part II. Elasto-plastic properties by nanoindentation
TL;DR: In this article, the elasto-plastic properties of La-Cr-O thin films deposited by RF-magnetron sputtering on stainless steel interconnect materials after annealing at high temperatures in air were studied.
Journal ArticleDOI
Nanoindentation Experimental Study on Mechanical Properties of As-cast BNi-2 Solder Alloy☆
TL;DR: In this paper, the authors used the model proposed by Dao et al. to obtain a comprehensive elastic-plastic properties understanding of as-cast BNi-2 filler metal which can be better application for engineering.
References
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Journal ArticleDOI
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
Warren C. Oliver,George M. Pharr +1 more
TL;DR: In this paper, the authors used a Berkovich indenter to determine hardness and elastic modulus from indentation load-displacement data, and showed that the curve of the curve is not linear, even in the initial stages of the unloading process.
Journal ArticleDOI
The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile
TL;DR: In this article, a solution of the axisymmetric Boussinesq problem is derived from which are deduced simple formulae for the depth of penetration of the tip of a punch of arbitrary profile and for the total load which must be applied to the punch to achieve this penetration.
Journal ArticleDOI
Indentation size effects in crystalline materials: A law for strain gradient plasticity
William D. Nix,Huajian Gao +1 more
TL;DR: In this article, the indentation size effect for crystalline materials can be accurately modeled using the concept of geometrically necessary dislocations, which leads to the following characteristic form for the depth dependence of the hardness: H H 0 1+ h ∗ h where H is the hardness for a given depth of indentation, h, H 0 is a characteristic length that depends on the shape of the indenter, the shear modulus and H 0.
Journal ArticleDOI
Mechanism-based strain gradient plasticity— I. Theory
TL;DR: In this paper, a mechanism-based theory of strain gradient plasticity is proposed based on a multiscale framework linking the microscale notion of statistically stored and geometrically necessary dislocations to the mesoscale notion of plastic strain and strain gradient.
Journal ArticleDOI
Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques
Alexei Bolshakov,George M. Pharr +1 more
TL;DR: In this article, the authors used finite element simulation of conical indentation of a wide variety of elastic-plastic materials to investigate the influences of pileup on the accuracy with which hardness and elastic modulus can be measured by load and depth-sensing indentation techniques.
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