Journal ArticleDOI
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
Ranjana Saha,William D. Nix +1 more
Reads0
Chats0
TLDR
In this paper, the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation were examined, and the properties of aluminum and tungsten films on the following substrates: aluminum, glass, silicon and sapphire.About:
This article is published in Acta Materialia.The article was published on 2002-01-08. It has received 1410 citations till now. The article focuses on the topics: Nanoindentation & Elastic modulus.read more
Citations
More filters
Journal ArticleDOI
Microscale Characterization of Mechanical Properties
TL;DR: In this paper, a review of uniaxial testing of microelectromechanical systems (MEMS) and other small-scale entities is presented, which provides valuable insight into size-scale effects on the elastic, brittle, and ductile behavior of micron-sized structures.
Journal ArticleDOI
On the uniqueness of measuring elastoplastic properties from indentation: The indistinguishable mystical materials
TL;DR: In this article, the uniqueness of the indentation test was studied and the existence of "mystical materials" which have distinct elastoplastic properties yet they yield almost identical indentation behaviors, even when the indenter angle is varied in a large range.
Journal ArticleDOI
Metallic NEMS components fabricated from nanocomposite Al–Mo films
Zonghoon Lee,Colin Ophus,L. M. Fischer,N Nelson-Fitzpatrick,K. Westra,Stephane Evoy,Velimir Radmilovic,U. Dahmen,David Mitlin +8 more
TL;DR: In this article, a nano-electro-mechanical system (NEMS) cantilever was fabricated from metallic alloy nanocomposite films of Al-Mo. At thickness of 4.3 and 20.0 nm, these are the thinnest released metal cantilevers reported in the literature.
Journal ArticleDOI
Analysis of nanoindentation creep for polymeric materials
TL;DR: In this article, a semi-empirical method has been established from a generalized Kelvin model, which includes the elastic-viscoelastic-viscous effects on indentation creep.
Journal ArticleDOI
A Critical Review of Microscale Mechanical Testing Methods Used in the Design of Microelectromechanical Systems
V. T. Srikar,S.M. Spearing +1 more
TL;DR: In this article, a rational approach for the selection of test techniques for the design of micro-structures is suggested, and the characteristics of typical test structures and the common sources of structure-related errors in measurement are discussed.
References
More filters
Journal ArticleDOI
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
Warren C. Oliver,George M. Pharr +1 more
TL;DR: In this paper, the authors used a Berkovich indenter to determine hardness and elastic modulus from indentation load-displacement data, and showed that the curve of the curve is not linear, even in the initial stages of the unloading process.
Journal ArticleDOI
The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile
TL;DR: In this article, a solution of the axisymmetric Boussinesq problem is derived from which are deduced simple formulae for the depth of penetration of the tip of a punch of arbitrary profile and for the total load which must be applied to the punch to achieve this penetration.
Journal ArticleDOI
Indentation size effects in crystalline materials: A law for strain gradient plasticity
William D. Nix,Huajian Gao +1 more
TL;DR: In this article, the indentation size effect for crystalline materials can be accurately modeled using the concept of geometrically necessary dislocations, which leads to the following characteristic form for the depth dependence of the hardness: H H 0 1+ h ∗ h where H is the hardness for a given depth of indentation, h, H 0 is a characteristic length that depends on the shape of the indenter, the shear modulus and H 0.
Journal ArticleDOI
Mechanism-based strain gradient plasticity— I. Theory
TL;DR: In this paper, a mechanism-based theory of strain gradient plasticity is proposed based on a multiscale framework linking the microscale notion of statistically stored and geometrically necessary dislocations to the mesoscale notion of plastic strain and strain gradient.
Journal ArticleDOI
Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques
Alexei Bolshakov,George M. Pharr +1 more
TL;DR: In this article, the authors used finite element simulation of conical indentation of a wide variety of elastic-plastic materials to investigate the influences of pileup on the accuracy with which hardness and elastic modulus can be measured by load and depth-sensing indentation techniques.
Related Papers (5)
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
Warren C. Oliver,George M. Pharr +1 more
Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology
Warren C. Oliver,George M. Pharr +1 more
A method for interpreting the data from depth-sensing indentation instruments
M. F. Doerner,William D. Nix +1 more