Journal ArticleDOI
Efficient pulsed laser removal of 0.2 μm sized particles from a solid surface
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TLDR
In this article, a new and highly efficient laser cleaning method was proposed by choosing a pulsed laser with short pulse duration and a wavelength that is strongly absorbed by the surface; the removal efficiency was further enhanced by depositing a liquid film of thickness on the order of micron on the surface just before the pulsing laser irradiation.Abstract:
Laser cleaning with pulsed ultraviolet and infrared lasers is successfully employed to remove particulate contamination from silicon wafer surfaces and from delicate lithography membrane masks. Particulate material investigated include latex, alumina, silicon, and gold. Gold particles as small as 0.2 μm can be effectively removed. This new and highly efficient laser cleaning is achieved by choosing a pulsed laser with short pulse duration (without causing substrate damage), and a wavelength that is strongly absorbed by the surface; the removal efficiency is further enhanced by depositing a liquid film of thickness on the order of micron on the surface just before the pulsed laser irradiation.read more
Citations
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Journal ArticleDOI
Laser ablation in liquids : Applications in the synthesis of nanocrystals
TL;DR: In this article, the authors present a survey on the recent progress in laser ablation of a solid target in a confining liquid for the synthesis of nanocrystals with focus on the mechanism of the nanocrystal growth.
Journal ArticleDOI
Laser‐cleaning techniques for removal of surface particulates
TL;DR: In this paper, it was shown that laser cleaning with highest efficiency is achieved by choosing a laser wavelength that is strongly absorbed by the surface together with pulse depositing a water film of thickness on the order of microns on the surface momentarily before the pulsed laserirradiation.
Journal ArticleDOI
Thermodynamic pathways to melting, ablation, and solidification in absorbing solids under pulsed laser irradiation
TL;DR: In this paper, the authors investigated the thermodynamic pathways involved in laser irradiation of absorbing solids in silicon for pulse durations of $500\phantom{\rule{0.3em}{0ex}}\mathrm{fs}$ and $100 \phantom{ 0.3m{0ex}ps}$.
Journal ArticleDOI
Excitation of nanoscale vapor bubbles at the surface of gold nanoparticles in water.
TL;DR: It is shown that the water temperature rises to near the critical temperature and the water undergoes an explosive evaporation in the subnanosecond range, and the formation of vapor bubbles shows a threshold dependence on laser fluence.
Journal ArticleDOI
Underwater and water-assisted laser processing: Part 1—general features, steam cleaning and shock processing
TL;DR: In this article, the advantages and disadvantages of laser processing in the presence of water, light transmission by water, and the two most mature methods of water-assisted laser processing: steam cleaning and shock processing.
References
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Journal ArticleDOI
Adhesion and Removal of Fine Particles on Surfaces
TL;DR: In this article, the authors proposed a method for measuring the adhesion of particles to microelectronic circuits and to other surfaces in production environments, so that effective ways for preventing deposition and cleaning contaminated surfaces may be devised.
Journal ArticleDOI
Laser‐assisted micron scale particle removal
K. Imen,S. J. Lee,Susan D. Allen +2 more
TL;DR: In this article, a laser assisted particle removal (LAPR) technique was proposed to remove micron-scale particles from semiconductor substrates using water and CO2 laser pulses.
Proceedings Article
Laser assisted micron scale particle removal
K. Imen,S. J. Lee,Susan D. Allen +2 more
TL;DR: In this article, the authors describe the problem of removing submicron particles by conventional means, where the particle size decreases as the particle weight becomes less significant compared with other adhesive forces.
Journal ArticleDOI
Mechanics of removing glass particulates from a solid surface
S. Bhattacharya,K.L. Mittal +1 more
TL;DR: In this article, a series of experiments underscores the importance of the capillary force in the adhesion of a particulate to a surface, and the authors calculate the force required to roll a particle off a surface from the theoretical adhesion force between a particle and a surface and particulate deformation characteristics.