Proceedings ArticleDOI
Frequency-Mismatch-Tolerant Silicon Vibratory Gyroscope without Vacuum Package for Automotive Applications
TLDR
A low-cost silicon vibratory gyroscope that tolerates a relatively large mismatch between the driving-mode and sensing-mode frequencies is described in this article. But it does not have the capability to operate at sub-degree-per-second angular rate sensitivity.Abstract:
This paper describes a low-cost silicon vibratory gyroscope that tolerates a relatively large mismatch between the driving-mode and sensing-mode frequencies. The gyroscope is based on beam-mass structure and realized by one silicon proof mass and two beams for the driving and sensing mode. Piezoelectric actuation is used to produce a large driving mode vibration displacement (about 100 mum) with about 32 Vpeak-to-peak. Two tiny sensing beams are separated from the vertical silicon beam to increase the sensitivity while keeping the sensing-mode resonant frequency high. Piezoresistive and piezoelectrical sensing mechanisms are applied to two different gyroscopes. The gyroscope operating at 1-4 kHz is capable of sub-degree-per-second angular rate sensitivity without any vacuum package.read more
Citations
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A single-crystal silicon vibrating ring gyroscope
Guohong He,Khalil Najafi +1 more
TL;DR: In this paper, a vibrating ring gyroscope fabricated in (111) oriented single-crystal silicon (SCS) is reported. But the performance of the gyro has not been evaluated.
References
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Proceedings ArticleDOI
Micromachined bar-structure gyroscope with high Q-factors for both driving and sensing mode at atmospheric pressure
TL;DR: In this paper, a novel micromachined electro-magnetically driven fork tuning type gyroscope with bar-structure working at atmospheric pressure is presented, and the angular rate is sensed by detecting the differential change of capacitance between the bar structures electrodes and the fixed interdigitated electrodes.
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