Journal ArticleDOI
Increasing the sensitivity for tilt measurement using a cyclic interferometer with multiple reflections
TLDR
In this paper, a cyclic interferometer was used to measure tilt in which the sensitivity to tilt measurement was double when compared with that of the classical Michelson interferometers.Abstract:
Measurement of tilt plays an important role in metrological applications and consequently, several methods have been proposed in the recent past. Classical interferometric methods can measure angles with high accuracy but are easily susceptible to external turbulences. We propose to use a cyclic interferometer to measure tilt in which the sensitivity to tilt measurement is double when compared with that of the classical Michelson interferometer. Since the counter propagating beams travel identical paths, the interferometer is insensitive to external vibrations and turbulence and thus can be used under harsh environmental conditions. The novelty in the technique lies in creating multiple reflections in the tilt mirror to enhance the measurement accuracy by the way of increasing the sensitivity. This paper presents the basics of the interferometer and experimental results to quantify the increase in sensitivity. By increasing the number of reflections, it is shown that sensitivity can be further improved to measure tilt angles below 5 μ rad .read more
Citations
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Journal ArticleDOI
Nano scale tilt measurement using a polarizing phase shifting cyclic interferometer
TL;DR: In this paper, the authors presented an improved method of high precision tilt measurement using a phase shifting cyclic interferometer, which employed Polarizing phase shifting interferometry (PPSI) as well as multiple reflections for improving the sensitivity.
Proceedings ArticleDOI
Effect of beam quality on tilt measurement using cyclic interferometer
TL;DR: In this paper, the effect of aberration of the input beam on the accuracy of tilt measurement was investigated using multiple reflections in a cyclic interferometer, and the results on this study are presented in this paper.
Journal ArticleDOI
Improving Angular Accuracy of a Scanning Mirror Based on Error Modeling and Correction.
TL;DR: Experimental results show that the angle correction method was effective in improving the linearity of the eddy current sensors and reducing the influence of manufacturing and installation errors.
Proceedings ArticleDOI
Effect of Visibility of the Fringes on the Tilt Measurement Using a Cyclic Interferometer and Polarization Phase Shifting
TL;DR: In this article, the effect of the misalignment of the quarter wave plate on the visibility of the fringes and consequently on the accurcy of the measurement was numerically investigated and a new scheme of polarizing phase shifting techique was developed which is rather simpler compared to those reported in the literature.
Journal Article
Nanoscale tilt measurement using a cyclic interferometer with phase stepping and multiple reflections
TL;DR: Naderishahab et al. as mentioned in this paper used a cyclic interferometer with four mirrors to measure tilt angles as small as a few nanoradians, and a simple method of phase shift by polarization was developed to enhance measurement sensitivity and accuracy.
References
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Journal ArticleDOI
Angle Measuring Interferometer
TL;DR: A cube-corner angle-measuring interferometer has been developed which reproduces angles up to 30° with a precision of 0.01″ as mentioned in this paper, which is due both to imperfections in available optical parts and to building vibration.
Journal ArticleDOI
Small roll angle measurement using lateral shearing cyclic path polarization interferometry.
TL;DR: A technique for the measurement of roll angular displacement of a rotary stage using a lateral shearing cyclic path optical configuration (CPOC) setup and polarization phase shifting interferometry (PPSI).
Journal ArticleDOI
Angular probe based on using Fabry-Perot etalon and scanning technique
TL;DR: A novel angular probe using the Fabry-Perot etalon and angular scanning technique and a setup constructed to implement the angular probe is introduced and analyzed, revealing that the probe is with high measurement resolution and sensitivity.
Journal ArticleDOI
Analysis and alignment of cyclic interferometers
TL;DR: In this paper, the use of a triangular cyclic interferometer for obtaining two counter-propagating optical beams which are accurately collinear is described, and its performance including the tolerance sensitivity is analyzed.
Journal ArticleDOI
Dual-arm multiple-reflection Michelson interferometer for large multiple reflections and increased sensitivity
TL;DR: In this article, a setup for matching path lengths to increase the resolution and allow for the reduction of the stringent requirement on the coherence length of the lasers used is presented. But, when altering the number of reflections, the system alignment becomes cumbersome.