Journal ArticleDOI
Microscopic TV shearography for characterization of microsystems
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TLDR
A microscopic TV shearographic configuration for characterization of microsystems is demonstrated by measuring the slope under relatively large out-of-plane deformation by combining a long working distance zoom imaging system with a conventional Michelson shear interferometer.Abstract:
We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented.read more
Citations
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Journal ArticleDOI
Shearography technology and applications: a review
TL;DR: A comprehensive overview of shearography is presented, describing the principle of operation, optical configurations, image processing algorithms and applications, with a focus on more recent technological advances.
Journal ArticleDOI
Enlarging the angle of view in Michelson-interferometer-based shearography by embedding a 4f system.
TL;DR: This work demonstrates a novel digital shearography system with a large angle of view in the optical arrangement, where the imaging lens is in front of the Michelson interferometer rather than behind it as in traditional digitalShearography.
Journal ArticleDOI
Multi-colour microscopic interferometry for optical metrology and imaging applications
TL;DR: The recent advances in multi-colour interferometric techniques and their demanding applications for characterization of micro-systems, non-destructive testing, and bio-imaging applications are reviewed.
Journal ArticleDOI
Simple educational tool for digital speckle shearography
TL;DR: In this article, an educational tool has been prepared for obtaining short-term and more economic training on digital speckle shearography (DSS) for non-destructive testing in aerospace, electronics and medical device manufacturing.
Journal ArticleDOI
Improved Mach-Zehnder interferometer-based shearography
Changqing Cai,Lingfeng He +1 more
TL;DR: In this article, a novel digital shearography set-up with a large angle of view, which is based on the combination of new CCD technology, a semiconductor laser, a Mach-Zehnder shear interferometer and a 4f system, is demonstrated.
References
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Journal ArticleDOI
Deformation and shape measurement using multiple wavelength microscopic TV holography
TL;DR: In this article, a multiple-wavelength TV holographic configuration was proposed for deformation and shape analysis of micro-objects using phase-shifted frames at three different wavelengths before and after deformation of the specimen.
Journal ArticleDOI
Additive–subtractive two-wavelength ESPI contouring by using a synthetic wavelength phase shift
TL;DR: The addition correlation of two speckle fields by simultaneousillumination at different wavelengths is used for object contouring in a Twyman-Green-type interferometer and a method is provided that lends itself to applications in noisy environments.