Journal ArticleDOI
Microscopic TV shearography for characterization of microsystems
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TLDR
A microscopic TV shearographic configuration for characterization of microsystems is demonstrated by measuring the slope under relatively large out-of-plane deformation by combining a long working distance zoom imaging system with a conventional Michelson shear interferometer.Abstract:
We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented.read more
Citations
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Journal ArticleDOI
Use of two wavelengths in microscopic TV holography for nondestructive testing
Paul Kumar Upputuri,Somasundaram Umapathy,Manojit Pramanik,M. P. Kothiyal,Krishna Mohan Nandigana +4 more
TL;DR: In this paper, a two-wavelength TV holography using a single-chip color charge-coupled device (CCD) camera for NDT of microspecimens is presented.
Proceedings ArticleDOI
White light interferometer with color CCD for 3D-surface profiling of microsystems
TL;DR: In this paper, a white light interferometer with a single-chip color CCD camera is used for high-resolution full-filed 3D surface profiling of micro-systems.
Proceedings ArticleDOI
White light single-shot interferometry with colour CCD camera for optical inspection of microsystems
TL;DR: In this article, a single-shot white light interferometer based on single-chip color CCD camera and Hilbert transformation is proposed for surface profiling of reflective micro-scale-samples.
Journal ArticleDOI
Quantitative detection of internal defects based on morphological opening, filling and binarizing operations on wrapped phase of out-of-plane deformation in digital speckle pattern interferometry
TL;DR: In this article, a method used for quantitative detection of internal defects with boundary of arbitrary shape is proposed, based on sequential morphological opening, filling and binarizing operations on the wrapped phase of out-of-plane deformation in phase-shifting digital speckle pattern interferometry.
Proceedings ArticleDOI
Applications of higher-order phase shifting algorithms for multiple-wavelength metrology
TL;DR: Various phase shifting algorithms, and their tolerance for phase shift error are discussed, and the applications of higher-order phased shifting algorithms will be presented, useful for multiple-wavelength and white light interferometry where more than one wavelength is used for optical phase measurements.
References
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Journal ArticleDOI
A simple and effective method for filtering speckle-interferometric phase fringe patterns
TL;DR: It is shown that a simple process such as multiple repetition of an anisotropic sine/cosine average filter produces the effect of an excellent automatic adaptive filter for filtering speckle-interferometric phase fringe patterns.
Journal ArticleDOI
Window function influence on phase error in phase-shifting algorithms.
Joanna Schmit,Katherine Creath +1 more
TL;DR: This work presents five different eight-point phase-shifting algorithms, each with a different window function, and demonstrates that the shape of the window function significantly influences phase error.
Journal ArticleDOI
Recent developments in interferometry for microsystems metrology
TL;DR: This poster presents a probabilistic procedure for inferring the shape of the Tv-Holography system using Holographic Microscopy and White-Light Interferometry data.
Journal ArticleDOI
Microscopic TV holography for MEMS deflection and 3-D surface profile characterization
TL;DR: In this article, a microscopic TV holographic system using a long working distance microscope with an extended zoom range has been developed for microelements and MEMS deformation and 3-D surface profile analysis.
Journal ArticleDOI
Digital laser microinterferometer and its applications
Lianxiang Yang,Paul Colbourne +1 more
TL;DR: In this article, a universal digital laser microinterferometer is presented, which can measure the shape, displacement, and strain and stress of microelements and microelectromechanical systems (MEMSs).