Journal ArticleDOI
Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering
Yongjun Wang,Hongxuan Li,Li Ji,Fei Zhao,Qinghua Kong,Yongxia Wang,Xiaohong Liu,Weilong Quan,Huidi Zhou,Jianmin Chen +9 more
TLDR
In this paper, the effects of deposition bias voltage on the microstructure, mechanical and tribological properties of the resultant graphite-like amorphous carbon (GLC) films were investigated by means of X-ray photoelectron spectroscopy (XPS), Raman spectrography, atomic force microscopy (AFM), high resolution transmission electron microscopy, high-resolution transmission electron microscope (HRTEM), nano-indentation, and tribology experiments, respectively.Abstract:
Graphite-like amorphous carbon (GLC) films were fabricated by unbalanced magnetron sputtering on silicon and stainless steel substrates The effects of deposition bias voltage on the microstructure, mechanical and tribological properties of the resultant films were investigated by means of X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, atomic force microscopy (AFM), high resolution transmission electron microscopy (HRTEM), nano-indentation and tribological experiments, respectively The results show that the present films are dominated by sp 2 sites, and the microstructure and properties of the resultant films strongly depend upon the deposition bias voltage Namely, the sp 3 content, hardness, elastic modulus and critical load monotonically increase with increasing deposition bias voltage from 50 to 150 V, and then they decrease with further increasing the bias voltage to 185 V, while internal stress decreases at first and then increases with further increasing of deposition bias voltage The films deposited at different bias voltages have high surface roughness Tribological properties of the films are closely related with the deposition bias voltage, 150 V is the optimum value for obtaining good wear resistanceread more
Citations
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Journal ArticleDOI
Influence of substrate bias voltage on structure and properties of the CrAlN films deposited by unbalanced magnetron sputtering
TL;DR: In this article, the influence of substrate bias on deposition rate, composition, structure, morphology and properties of the CrAlN films was investigated, and it was found that the films deposited at moderate bias voltage had better mechanical and tribological properties, while the films at higher bias voltage showed better corrosion resistance.
Journal ArticleDOI
An analysis of tribological performance on Cr/GLC film coupling with Si3N4, SiC, WC, Al2O3 and ZrO2 in seawater
TL;DR: In this article, the tribo-chemical products between the Cr/GLC film and ceramics also played an important role in improving the tribological performances of the film.
Journal ArticleDOI
Graphite-like carbon films by high power impulse magnetron sputtering
TL;DR: In this article, high-power impulse magnetron sputtering (HiPIMS) was employed to fabricate graphite-like amorphous carbon (GLC) films.
Journal ArticleDOI
Effects of Metamorphism and Deformation on the Coal Macromolecular Structure by Laser Raman Spectroscopy
TL;DR: In this article, experiments were conducted using coal samples with different metamorphic degrees and deformation types from different regions of Hebei, Henan, Shanxi, and Anhui province, followed by laser Raman spectral analysis.
Journal ArticleDOI
Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow
Yu. V. Fedoseeva,G. A. Pozdnyakov,Alexander V. Okotrub,M. A. Kanygin,Yu. V. Nastaushev,Oleg Yu. Vilkov,Lyubov G. Bulusheva +6 more
TL;DR: In this article, the authors used the methods of scanning and transmission electron microscopy, X-ray photoelectron, near-edge Xray absorption fine structure, Fourier transform infrared and Raman spectroscopy to reveal changes in the chemical connectivity of amorphous oxygenated hydrocarbon (COxHy) films grown on silicon substrates heated to 300, 500, and 700°C using a supersonic flow of methane plasma.
References
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Journal ArticleDOI
Interpretation of Raman spectra of disordered and amorphous carbon
Andrea C. Ferrari,John Robertson +1 more
TL;DR: In this paper, a model and theoretical understanding of the Raman spectra in disordered and amorphous carbon is given, and the nature of the G and D vibration modes in graphite is analyzed in terms of the resonant excitation of \ensuremath{\pi} states and the long-range polarizability of the long range bonding.
Journal ArticleDOI
Diamond-like amorphous carbon
TL;DR: In this paper, the authors describe the deposition methods, deposition mechanisms, characterisation methods, electronic structure, gap states, defects, doping, luminescence, field emission, mechanical properties and some applications of diamond-like carbon.
Journal ArticleDOI
Resonant Raman spectroscopy of disordered, amorphous, and diamondlike carbon
Andrea C. Ferrari,John Robertson +1 more
TL;DR: In this article, the dispersion of peak positions and intensities with excitation wavelength is used to understand the nature of resonant Raman scattering in carbon and how to derive the local bonding and disorder from the Raman spectra.
Journal ArticleDOI
Characterization of amorphous and nanocrystalline carbon films
Paul K. Chu,Liuhe Li +1 more
TL;DR: In this paper, the structures of various types of amorphous carbon films and common characterization techniques are described, which can be classified as polymer-like, diamond-like or graphite-like based on the main binding framework.
Journal ArticleDOI
Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy
P. J. Fallon,V.S. Veerasamy,C.A. Davis,John Robertson,Gehan A. J. Amaratunga,William I. Milne,J. Koskinen +6 more
TL;DR: Data are found to support deposition models in which the highly tetrahedrally bonded form on nonhydrogenated amorphous carbon arises from the subplantation of incident ions, giving rise to a quenched increase in density and strain.
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