Proceedings ArticleDOI
Piezoelectric micromechanical disk resonators towards UHF band
Le Yan,Jian Wu,William C. Tang +2 more
- Vol. 2, pp 926-929
TLDR
In this article, the design, simulation, fabrication, and test results of a new type of piezoelectrically transduced micromechanical disk resonator approaching UHF frequencies were presented.Abstract:
This paper presents the design, simulation, fabrication, and test results of a new type of piezoelectrically transduced micromechanical disk resonator approaching UHF frequencies. The resonators were fabricated from silicon-on-insulator (SOI) wafers with a 4-mask low-temperature process. The highest processing temperature was 250/spl deg/C, allowing post-CMOS integration compatibility. Several prototype resonators with measured diameter of 100 /spl mu/m and 60 /spl mu/m were tested in air, with the highest resonant peak observed at 208 MHz, which matched well with simulation results from finite-element analysis. A quality factor of 15 at 208 MHz was extracted, and is expected to be significantly higher with an optimized design and vacuum testing.read more
Citations
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Journal ArticleDOI
Active Disturbance Rejection Control for Piezoelectric Beam
TL;DR: In this article, an active control method for piezoelectric beam dynamics is proposed, where all external disturbances are treated intheir totality as an input disturbance which is subsequently estimated and canceled in real time, reducing the challenging problem to a manageable one.
Journal ArticleDOI
Strain self-sensing of a piezoelectric material using phase delay compensation
TL;DR: In this article, the authors deal with analytical modeling and experimental verification of strain self-sensing in a piezoelectric beam consisting of two laminated lead zirconium titanates on a metal shim and generate bi-directional movement.
Proceedings ArticleDOI
On active vibration suppression of a piezoelectric beam
TL;DR: Simulation and experimental results in this paper demonstrate the significant advancement of the ADRC as an easier, simpler and better control method that is ready to be deployed in practice.
Patent
Resonators, resonator arrays, apparatus and methods
TL;DR: A resonator is a substantially disk shaped portion having a plurality of axes of symmetry and is configured to resonate in a multiplicity of resonant modes by symmetrically deforming about the plurality of axis of symmetry.
Proceedings ArticleDOI
Radial vibration of the MEMS disk considering its mounting and electrodes form
TL;DR: In this paper, the method of the thin piezoceramic MEMS disk resonator with asymmetric electrodes and supported to the substrate with mounting that has a circular segment form radial oscillation calculation is given.
References
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Proceedings ArticleDOI
Laterally driven polysilicon resonant microstructures
TL;DR: In this article, interdigitated finger structures are used for electrostatically exciting the resonance of polysilicon microstructures parallel to the plane of the substrate, with frequencies ranging from 18 kHz to 80 kHz and quality factors from 20 to 130.
Journal ArticleDOI
Piezoelectric thin film micromechanical beam resonators
TL;DR: In this paper, a dynamic admittance model describing the electromechanical behavior of piezoelectric beam resonators is presented, and the results indicate that the resonators offer significant potential for high-frequency applications.
Proceedings ArticleDOI
Micromechanical "hollow-disk" ring resonators
TL;DR: In this paper, a hollow disk ring resonator with notched support attachments was proposed. But the support attachment was placed closer to actual extensional ring nodal points, which was notched for substantially higher Q. At 1.2 GHz, a combination of high Q and larger capacitive transducers allowed the notched version to achieve an R/sub x/ of only 282 k/spl Omega, which is 12X smaller than achieved by previous pure polysilicon surface-micromachined solid disk resonators in the GHz range.
Proceedings ArticleDOI
1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support
TL;DR: The first CVD nanocrystalline diamond micromechanical disk resonator with material mismatched stem has been demonstrated at a record frequency of 1.51 GHz with an impressive Q of 11,555 as mentioned in this paper.
Proceedings ArticleDOI
Stemless wine-glass-mode disk micromechanical resonators
TL;DR: Polysilicon wine-glass mode micromechanical disk resonators using a stemless, non-intrusive suspension structure have been demonstrated in both vacuum and atmospheric pressure at frequencies around 73.4 MHz with Q's as high as 98,000 in vacuum, and 8,600 in atmosphere as mentioned in this paper.