Proceedings ArticleDOI
Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications
Gianluca Piazza,P.J. Stephanou,J.M. Porter,Muthu B. J. Wijesundara,Albert P. Pisano +4 more
- pp 20-23
TLDR
In this article, a new class of ring-shaped, contour-mode aluminum nitride piezoelectric resonators with high quality factors in air (Q/sub max/=2,900 at 472.7 MHz), low motional resistance (ranging from 56 to 205 /spl Omega/), and center frequencies that can be lithographically tuned.Abstract:
This paper reports experimental results on a new class of ring-shaped, contour-mode aluminum nitride piezoelectric resonators that span a frequency range from 223 MHz to 656 MHz showing high quality factors in air (Q/sub max/=2,900 at 472.7 MHz), low motional resistance (ranging from 56 to 205 /spl Omega/), and center frequencies that can be lithographically tuned. These resonators achieve the lowest value of motional resistance ever reported for contour-mode resonators and combine it with high Q factors, therefore truly enabling the fabrication of arrays of microresonators with different frequencies on a single chip. Uncompensated temperature coefficients of frequency of only approximately -25 ppm//spl deg/C were also recorded for these resonators.read more
Citations
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Journal ArticleDOI
MEMS technology for timing and frequency control
TL;DR: As vibrating RF MEMS devices are perceived more as circuit building blocks than as stand-alone devices, and as the frequency processing circuits they enable become larger and more complex, the makings of an integrated micromechanical circuit technology begin to take shape, perhaps with a functional breadth not unlike that of integrated transistor circuits.
Journal ArticleDOI
Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
TL;DR: In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.
Journal ArticleDOI
SoC Issues for RF Smart Dust
TL;DR: The feasibility of a complete, cubic millimeter scale, single-chip sensor node is explored by examining practical limits on process integration and energetic cost of short-range RF communication.
Journal ArticleDOI
One and Two Port Piezoelectric Higher Order Contour-Mode MEMS Resonators for Mechanical Signal Processing
TL;DR: In this paper, the design, fabrication and testing of novel one and two port piezoelectric higher-order contour-mode MEMS resonators that can be employed in RF wireless communications as frequency reference elements or arranged in arrays to form banks of multi-frequency filters are presented.
Journal ArticleDOI
The Resonant Body Transistor
Dana Weinstein,Sunil A. Bhave +1 more
TL;DR: The resonant body transistor (RBT), a silicon-based dielectrically transduced nanoelectromechanical (NEM) resonator embedding a sense transistor directly into the resonator body, marks the highest frequency acoustic resonance measured to date on a silicon wafer.
References
More filters
Journal ArticleDOI
PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)
TL;DR: In this paper, an ultra-miniature duplexer (5 × 8 × 2.2 mm3) consisting of two FBAR filters and nine passive components operating at 1900 MHz is described.
Proceedings ArticleDOI
Micromechanical "hollow-disk" ring resonators
TL;DR: In this paper, a hollow disk ring resonator with notched support attachments was proposed. But the support attachment was placed closer to actual extensional ring nodal points, which was notched for substantially higher Q. At 1.2 GHz, a combination of high Q and larger capacitive transducers allowed the notched version to achieve an R/sub x/ of only 282 k/spl Omega, which is 12X smaller than achieved by previous pure polysilicon surface-micromachined solid disk resonators in the GHz range.
Proceedings ArticleDOI
1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support
TL;DR: The first CVD nanocrystalline diamond micromechanical disk resonator with material mismatched stem has been demonstrated at a record frequency of 1.51 GHz with an impressive Q of 11,555 as mentioned in this paper.
Proceedings ArticleDOI
The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter
Brian L. Bircumshaw,Gang Logan Liu,Hideki Takeuchi,Tsu-Jae King,Roger T. Howe,Oliver M. O’Reilly,Albert P. Pisano +6 more
TL;DR: The radial bulk annular resonator (RBAR) as mentioned in this paper utilizes the bulk radial resonant modes of an annulus to achieve an arbitrarily low motional resistance for any desired resonant frequency at the cost of increased average annular radius.