Preliminary Modelling and Implementation of the 2D-control for a Nanopositioning Long Range Stage
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TLDR
In this paper, a two-dimensional nanopositioning platform (NanoPla) has been designed and manufactured to obtain effective positioning at nanometer scale with increased working ranges.About:
This article is published in Procedia Engineering.The article was published on 2015-01-01 and is currently open access. It has received 4 citations till now. The article focuses on the topics: Control theory.read more
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Large range nanopositioning stage design: A three-layer and two-stage platform
TL;DR: In this article, a two-dimensional nanopositioning platform (NanoPla) is described, which is characterized by a three-layer architecture and two-stage motion strategy.
Journal ArticleDOI
One-Dimensional Control System for a Linear Motor of a Two-Dimensional Nanopositioning Stage Using Commercial Control Hardware.
Lucía Candela Díaz Pérez,Marta Torralba Gracia,José Antonio Albajez García,José Antonio Yagüe Fabra +3 more
TL;DR: A one-dimensional (1D) control strategy for positioning a Halbach linear motor has been developed, implemented, and experimentally validated and it was verified that the control system achieves the working requirements of the NanoPla.
Journal ArticleDOI
Implementation of the control strategy for a 2D nanopositioning long range stage
TL;DR: In this paper, a 2D-platform stage able to obtain an effective metrological positioning with nanometer resolution and long working range (50 x 50 mm 2 ) is developed at the University of Zaragoza.
Journal ArticleDOI
Positioning uncertainty of the control system for the planar motion of a nanopositioning platform
TL;DR: The developed control system is extended to the four motors of the nanopositioning platform to generate a 2D planar movement in the whole working range of the NanoPla, achieving a positioning uncertainty of ±0.5 µm along the wholeWorking range.
References
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A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy
Marta Torralba,José A. Yagüe-Fabra,J.A. Albajez,Margarita Valenzuela,R. Acero,Juan Jesús Castillo Aguilar,María de Luna +6 more
TL;DR: In this article, a two-dimensional moving nano-platform (NanoPla) is designed to characterize surface topography of larger areas with an integrated atomic force microscopy (AFM) system.