Journal ArticleDOI
Pressure effect on YBa2Cu3O7 thin film growth in off‐axis radio frequency magnetron sputtering
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TLDR
YBa2Cu3O7−x (123) thin films were fabricated on (100) MgO substrates by off-axis single target radio frequency (rf) magnetron sputtering and an empirical formula was derived to explain the dependence of the deposition rate of various components on the pressure.Abstract:
YBa2Cu3O7−x (123) thin films were fabricated on (100) MgO substrates by off‐axis single target radio frequency (rf) magnetron sputtering. Our study focused on the effect of chamber pressure on the composition, microstructure, and superconductive properties on transition behavior and Tc of the grown film studied. An empirical formula was derived to explain the dependence of the deposition rate of various components on the pressure. Next, we compared the transport mechanism of the sputtered particles between the off‐axis rf and the on‐axis direct current sputtering and determined the processing conditions that result in superconducting films of better quality. According to our findings, growth at higher pressures (≳100 mTorr) produces more homogeneous and higher Tc superconducting films.read more
Citations
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Surface texture and structure of ZnO films synthesized by off-axis sputtering deposition
TL;DR: In this article, the morphology and structure of ZnO films on sapphire and glass substrates by off-axis sputtering were investigated at various temperatures and pressures, and a morphology transition from large well-defined hexagonal grains to flat surface was observed at a pressure of 50 mtorr and temperature of 550 C.
Journal ArticleDOI
The pressure dependence of structure and composition of sputtered AlCrSiTiMoO high entropy thin film
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TL;DR: In this article, the effect of working pressure on the properties of high entropy alloy AlCrSiTiMoO thin film was evaluated by unbalanced DC magnetron sputtering at different working pressures including 1, 4, 8, and 12 mTorr.
Journal ArticleDOI
Influence of the sputtering variables in the ion bombardment during off-axis deposition of YBa2Cu3Ox films
TL;DR: YBa2Cu3Ox thin films were grown on SrTiO3 substrates using an off-axis-sputtering configuration in this article, but only medium quality films were obtained.
Journal ArticleDOI
Parametric study of sputtered Sr-deficient SrBi2Ta2O9 thin films
TL;DR: In this paper, the effect of deposition parameters on microstructures and chemical composition were studied using x-ray diffraction (XRD), field emission scanning electron microscopy, and xray photoelectron spectroscopy (XPS).
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