Proceedings ArticleDOI
Progress on the development of active micro-structured optical arrays for x-ray optics
Daniel San-Martín,Dou Zhang,Tim W. Button,Carolyn Atkins,Peter Doel,Hongchang Wang,David J. Brooks,Charlotte Feldman,Richard Willingale,Alan Michette,Slawka J. Pfauntsch,Shahin Sahraei,Matthew Shand,Ady James,Camelia Dunare,Tom Stevenson,William Parkes,Andy D. Smith +17 more
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TLDR
In this article, an active/adaptive micro-structured optical arrays (MOAs) were designed to focus X-rays using grazing incidence reflection through consecutive aligned arrays of microscopic channels etched in silicon.Abstract:
The Smart X-Ray Optics (SXO) project comprises a U.K.-based consortium developing active/adaptive micro-structured optical arrays (MOAs). These devices are designed to focus X-rays using grazing incidence reflection through consecutive aligned arrays of microscopic channels etched in silicon. The silicon channels have been produced both by dry and wet etching, the latter providing smoother channel walls. Adaptability is achieved using piezoelectric actuators, which bend the device and therefore change its focal distance. We aim to achieve a 5 cm radius of curvature which can provide a suitable focal length using a tandem pair MOA configuration. Finite Element Analysis (FEA) modelling has been carried out for the optimization of the MOA device design, consider different types of actuators (unimorph, bimorph and active fibre composites), and different Si/piezoelectric absolute and relative thicknesses. Prototype devices have been manufactured using a Viscous Plastic Processing Process for the piezoelectric actuators and dry etched silicon channels, bonded together using a low shrinkage adhesive. Characterisation techniques have been developed in order to evaluate the device performance in terms of the bending of the MOA channels produced by the actuators. This paper evaluates the progress to date on the actuation of the MOAs, comparing FEA modelling with the results obtained for different prototype structures.read more
Citations
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Novel microstructured adaptive X-ray optics
TL;DR: In this article, microstructured optical arrays (MOAs) have been used for x-ray microprobing, EUV lithography, and confocal xray microscopy.
Journal ArticleDOI
Active Microstructured Optical Arrays of Grazing Incidence Reflectors
Richard Willingale,Charlotte Feldman,Alan Michette,Tim W. Button,Camelia Dunare,Melvyn Folkard,David Hart,Chris McFaul,G. R. Morrison,William Parkes,Slawka J. Pfauntsch,A. Keith Powell,D. Rodriguez-Sanmartin,Shahin Sahraei,Matthew Shand,Tom Stevenson,Boris Vojnovic,Dou Zhang +17 more
TL;DR: The UK Smart X-Ray Optics (SXO) programme is developing active/adaptive optics for terrestrial applications as discussed by the authors, which focus X-rays using grazing incidence reflection through consecutive aligned arrays of microscopic channels.
Proceedings ArticleDOI
Development of spider micro-structured optical arrays for X-ray optics
Daniel San-Martín,Dou Zhang,Tim W. Button,Carl Meggs,Carolyn Atkins,Peter Doel,David J. Brooks,Charlotte Feldman,Richard Willingale,Alan Michette,Slawka J. Pfauntsch,Shahin Sahraei,Matthew Shand,Ady James,Graham Willis,Camelia Dunare,Tom Stevenson,William Parkes,Andrew Smith +18 more
TL;DR: In this paper, a combination of PZT actuators and a spider structure is used to bend the edges of the silicon chip, and a series of levers are connected with the active area at the centre, effectively amplifying the bend radius.
Dissertation
Smart piezoelectric devices for X-ray optics applications
TL;DR: In this paper, a spider actuator structure compatible with silicon wet etching of micro-structured optical arrays (MOAs) has been developed for laboratory based X-ray sources using micro structured optical arrays, which can bend to a 6.5cm radius and +/- 3mrad tip/tilt control of the MOAs.
Proceedings ArticleDOI
Micromachining optical arrays
Camelia Dunare,William Parkes,Tom Stevenson,Alan Michette,S. J. Pfauntsch,Matthew Shand,Tim W. Button,D. Rodriguez Sanmartin,D. Zhang,Charlotte Feldman,Richard Willingale,Peter Doel,Hongchang Wang,A. Smith,Ady James +14 more
TL;DR: In this article, two fabrication techniques, dry and wet etching, are described for microstructured optical arrays (MOAs), which consist of arrays of channels deep etched in silicon.
References
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Journal ArticleDOI
PZT thick films for sensor and actuator applications
TL;DR: PZT-PMN powder with a low melting point glass and the eutectic forming oxides Bi2O3 and ZnO have been obtained by combining a PZT and PMN powder, which shows excellent dielectric, ferroelectric and piezoelectric properties as mentioned in this paper.
Journal ArticleDOI
Applications and advances in polycapillary optics
TL;DR: Continuing optics manufacturing challenges include the advance of applications at energies above 40 keV and the production of optics for imaging which are of adequate clinical size and the development of crystallographic analysis software designed to be used with highly focused beams.
Journal ArticleDOI
Hard X-ray imaging with microchannel plate optics
Gareth J Price,Adam N. Brunton,George W. Fraser,Marcos Bavdaz,Marco W. Beijersbergen,J.-P. Boutot,Ray Fairbend,Sven Olof Flyckt,Anthony J. Peacock,Enrico Tomaselli +9 more
TL;DR: In this paper, two hard X-ray telescopes based on micro-channel plate (MCP) optics were investigated, by ray-trace simulation, and it was shown that such telescopes can provide Xray imaging at energies up to 100 keV, effective area may be scaled arbitrarily by co-aligning many MCP optics.
Journal ArticleDOI
Development of piezoelectric actuators for active X-ray optics
Dou Zhang,D. Rodriguez-Sanmartin,Tim W. Button,Carolyn Atkins,David J. Brooks,Peter Doel,Camelia Dunare,Charlotte Feldman,Ady James,Alan Michette,William Parkes,Slawka J. Pfauntsch,Shahin Sahraei,Tom Stevenson,Hongchang Wang,Richard Willingale +15 more
TL;DR: In this paper, two new prototype adaptive X-ray optical systems are under development with the aim of approaching the fundamental diffraction limit, one of which is micro-structured optical arrays (MOAs) involving two or four piezoelectric strips bonded to a silicon wafer to produce a micro-focused Xray source for biological applications, and which uses grazing incidence reflection through consecutive aligned arrays of channels obtained using deep silicon etching.
Novel microstructured adaptive X-ray optics
TL;DR: In this article, microstructured optical arrays (MOAs) have been used for x-ray microprobing, EUV lithography, and confocal xray microscopy.