Journal ArticleDOI
Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon
Jörn Bonse,Jörg Krüger +1 more
TLDR
In this paper, the formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSS) on single-crystalline silicon upon irradiation with single (N=1) and multiple (N≤1000) linearly polarized femtosecond (fs) laser pulses (pulse duration τ=130 fs, central wavelength λ=800 nm) in air is studied experimentally.Abstract:
The formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSS) on single-crystalline silicon upon irradiation with single (N=1) and multiple (N≤1000) linearly polarized femtosecond (fs) laser pulses (pulse duration τ=130 fs, central wavelength λ=800 nm) in air is studied experimentally. Scanning electron microscopy (SEM) and optical microscopy are used for imaging of the ablated surface morphologies, both revealing LIPSS with periodicities close to the laser wavelength and an orientation always perpendicular to the polarization of the fs-laser beam. It is experimentally demonstrated that these LIPSS can be formed in silicon upon irradiation by single fs-laser pulses—a result that is additionally supported by a recent theoretical model. Two-dimensional Fourier transforms of the SEM images allow the detailed analysis of the distribution of the spatial frequencies of the LIPSS and indicate, at a fixed peak fluence, a monotonous decrease in their mean spatial period between ∼770 nm...read more
Citations
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Journal ArticleDOI
Direct femtosecond laser surface nano/microstructuring and its applications
Anatoliy Y. Vorobyev,Chunlei Guo +1 more
TL;DR: In this article, a new field of direct femtosecond laser surface nano/microstructuring and its applications is reviewed, where the authors present a review of the current state-of-the-art in this field.
Journal ArticleDOI
Femtosecond laser-induced periodic surface structures
TL;DR: In this paper, the formation of laser-induced periodic surface structures (LIPSS) in different materials (metals, semiconductors, and dielectrics) upon irradiation with linearly polarized fs-laser pulses (τ,∼ 30-150 fs, λ, ∼, ∼ 800 nm) in air environment is studied experimentally and theoretically.
Journal ArticleDOI
Laser-Induced Periodic Surface Structures— A Scientific Evergreen
TL;DR: In this article, the current state in the field of laser-induced periodic surface structures (LIPSS) is reviewed, and the formation mechanisms are analyzed in ultrafast time-resolved scattering, diffraction, and polarization constrained double-pulse experiments.
Journal ArticleDOI
Ultrafast laser processing of materials: a review
TL;DR: In this paper, an overview of the different processes that can result from focusing an ultrafast laser light in the femtosecond-nanosecond time regime on a host of materials, e.g., metals, semiconductors, and insulators.
Journal ArticleDOI
Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application
TL;DR: This paper proposed to control localized transient electron dynamics by temporally or spatially shaping femtosecond pulses, and further to modify localized transient materials properties, and then to adjust material phase change, to implement a novel fabrication method.
References
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Journal ArticleDOI
Laser-induced periodic surface structure. I. Theory
TL;DR: In this paper, a theory for laser-induced periodic surface structure was developed by associating each Fourier component of induced structure with the corresponding Fourier components of inhomogeneous energy deposition just beneath the surface.
Journal ArticleDOI
Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser
TL;DR: It is shown that short-pulse laser-induced classical ripples on dielectrics, semiconductors, and conductors exhibit a prominent "non-classical" characteristic-in normal incidence the periods are definitely smaller than laser wavelengths, which indicates that the simplified scattering model should be revised.
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Femtosecond laser ablation of silicon–modification thresholds and morphology
TL;DR: In this article, the initial modification and ablation of crystalline silicon with single and multiple Ti:sapphire laser pulses of 5 to 400 fs duration was investigated, and the authors found the phenomena amorphization, melting, re-crystallization, nucleated vaporization, and Ablation to occur with increasing laser fluence down to the shortest pulse durations.
Journal ArticleDOI
On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses
TL;DR: In this paper, the formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSSss) on single-crystalline silicon upon irradiation with single or multiple femtosecond-laser pulses (pulse duration τ=130
Journal ArticleDOI
Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses
TL;DR: In this article, the growth of a grating perpendicular to the polarization vector consisting of nearly wavelength-sized periodic lines was observed with an increasing number of pulses per spot, up to 100, and the formation of equally oriented ripples with a spatial period close to half the laser wavelength.