Journal ArticleDOI
Raman studies of Ge-promoted stress modulation in 3C-SiC grown on Si(111)
Ch. Zgheib,Laurie E. McNeil,Michel Kazan,Pierre Masri,Francisco M. Morales,Oliver Ambacher,Jörg Pezoldt +6 more
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TLDR
In this paper, a study of the stress state in cubic silicon carbide (3C-SiC) thin films (120 and 300 nm) grown by solid-source molecular-beam epitaxy (SSMBE) on Si(111) substrates modified by the deposition of germanium prior to carbonization of Si.Abstract:
We present a study of the stress state in cubic silicon carbide (3C–SiC) thin films (120 and 300 nm) grown by solid-source molecular-beam epitaxy (SSMBE) on Si(111) substrates modified by the deposition of germanium prior to the carbonization of Si. μ-Raman measurements were used to determine the residual stress existing in the 3C–SiC layers. The stress is found to decrease linearly with increasing Ge quantity but with different strength depending on the 3C–SiC thickness deposited after the introduction of Ge. Based on secondary ions mass spectroscopy (SIMS) and transmission electron microscopy (TEM) analyses it is suggested that the Ge introduced prior to the carbonization step remains in the near-interface region and reduces the Si outdiffusion, which further reduces the stress state of the 3C–SiC layers.read more
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Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications
TL;DR: In this article, the basic operation principle for MEMS with wide band gap semiconductors is described, and the first applications of SiC based MEMS are demonstrated, and innovative MEMS and NEMS devices are reviewed.
Journal ArticleDOI
3C-SiC Heteroepitaxial Growth on Silicon: The Quest for Holy Grail
TL;DR: In this article, a review of 3C-SiC heteroepitaxial growth on a silicon substrate is presented, where various aspects of the growth process from substrate carbonization to epitaxy are discussed as a function of growth parameters.
Journal ArticleDOI
Strain and wafer curvature of 3C-SiC films on silicon : influence of the growth conditions
Marcin Zielinski,S. Ndiaye,Thierry Chassagne,Sandrine Juillaguet,R. Lewandowska,Marc Portail,André Leycuras,Jean Camassel +7 more
TL;DR: In this paper, the influence of the growth conditions on the residual strain and related optical and structural properties in the case of 3C-SiC films grown on (001) silicon substrates was studied.
Strain and wafer curvature of 3C-SiC films on silicon: influence of the growth conditions
Marcin Zielinski,S. Ndiaye,Thierry Chassagne,Sandrine Juillaguet,R. Lewandowska,Marc Portail,André Leycuras,Jean Camassel +7 more
TL;DR: In this paper, the influence of the growth conditions on the residual strain and related optical and structural properties in the case of 3C-SiC films grown on (001) silicon substrates was studied.
Journal ArticleDOI
Saddle‐shape warpage of thick 3C‐SiC wafer: Effect of nonuniform intrinsic stress and stacking faults
TL;DR: In this article, the authors investigated the intrinsic stress distribution along the 3C-SiC film thickness direction, and determined the dependence of the SiC/Si system curvature on the remaining 3CSiC thickness.
References
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Journal ArticleDOI
Raman scattering in polycrystalline 3 C − SiC : Influence of stacking faults
TL;DR: In this article, temperature dependent measurements of the Raman spectra of microcrystalline free-standing films were performed under direct laser heating of the thin films for temperatures up to 1700 K.
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Quantitative evaluation of biaxial strain in epitaxial 3C-SiC layers on Si(100) substrates by Raman spectroscopy
TL;DR: In this paper, biaxial strain coefficients for the longitudinal optical (LO) and transversal optical (TO) Raman lines in 3C-SiC membranes with a (100) texture are deflected by a variable pressure load on one side and the strain-induced shifts of the LO and TO Raman line are measured while the strain is simultaneously calculated from the membrane deflection vs pressure.
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Heteroepitaxial growth of (111) 3C–SiC on well-lattice-matched (110) Si substrates by chemical vapor deposition
TL;DR: In this paper, the growth of 3C-SiC on (110) Si substrates by chemical vapor deposition was carried out, and the grown epitaxial layers were investigated by high resolution transmission electron microscopic (HRTEM) analysis.
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Electrical characterization of SiC/Si heterostructures with Ge-modified interfaces
TL;DR: In this article, the electrical properties of the n-3C-SiC/p-Si heterojunction grown by solid source molecular beam epitaxy on germanium-modified Si(1.1) substrates have been investigated.
Journal ArticleDOI
Residual stress and texture in poly-SiC films grown by low-pressure organometallic chemical-vapor deposition
E. Hurtós,J. Rodrı́guez-Viejo +1 more
TL;DR: In this paper, a study of the stress state of polycrystalline 3C-SiC thin films grown on a-SiO2/Si(100) substrates by low-pressure chemical-vapor deposition using an organometallic precursor, tetramethylsilane (TMS), that contains both Si and C atoms is presented.