Journal ArticleDOI
Recent progress in filtered vacuum arc deposition
Raymond L. Boxman,V.N. Zhitomirsky,B. Alterkop,E. Gidalevich,Isak I. Beilis,Michael Keidar,S. Goldsmith +6 more
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TLDR
In this paper, it was shown that the plasma transport efficiency is limited by drifts caused by the centrifugal force and by the electric field generated by charge separation in the plasma.Abstract:
During this decade significant advances have been made both in the understanding and implementation of filtered vacuum are deposition. Rigid rotor models have been analyzed statistically, and new models which treat the mutual influence of the electrons and ions on each other self-consistently, take into account the centrifugal force on the ions, and take into consideration collisions, have been formulated. It was shown that the plasma transport efficiency is limited by drifts caused by the centrifugal force and by the electric field generated by charge separation in the plasma. For a range of magnetic fields strengths for which the ions are not magnetized, i.e., confined to a Larmor radius less than the duct radius, the transport efficiency for Cu plasma is about 10%, and depends only weakly on the magnetic field strength. Increased transmission is found when the ions are magnetized, reaching about 50% for a 36–60 mT field in typical configurations. The plasma transport efficiency and spatial distribution has been measured over a large parameter range, and correlated with the various theories. The plasma beam may be approximated as a Gaussian distribution which is displaced in the B × G direction, where G is in the direction of the centrifugal force, while a displacement in the plane of symmetry is surprisingly found in the − G direction. The total convected ion current decreases exponentially with distance from the toroidal filter entrance. Macroparticle transport within the magnetic filter has been analyzed, and it has been shown that electrostatic reflection from the walls can occur if the magnetic field is weak. Filtered arc sources with improved throughput performance and novel geometries have been built, and are now available commercially. The range of coatings deposited with FVAD has been expanded to include metals, oxides, and nitrides, as well as diamond-like carbon. In several cases, coatings having the highest quality reported in the literature have been fabricated with the FVAD technique, and one commercial application has been reported.read more
Citations
More filters
Journal ArticleDOI
60 years of DLC coatings: Historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications
TL;DR: In this paper, the development and broad potential of hard a-C coatings deposited by direct and filtered (FCVAE) cathodic arc evaporation, including pulsed arc, is highlighted.
Journal ArticleDOI
Review of cathodic arc deposition technology at the start of the new millennium
David M. Sanders,André Anders +1 more
TL;DR: A review of macroparticle filtering and arc control can be found in this article, where the authors describe recent developments in macroparticles filtering and arcs control for semiconductor, data storage, and optical coatings.
Journal ArticleDOI
Diamond and diamond-like carbon MEMS
TL;DR: In this paper, a review of diamond and diamond-like carbon (DLC) thin films in microelectro-mechanical systems (MEMS) can be found.
Journal ArticleDOI
Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition
TL;DR: In this paper, the influence of negative bias voltage applied to substrates and the nitrogen background pressure (up to 10−3 Torr) on film properties was studied by scanning electron microscopy (SEM) and electron energy loss spectroscopy (EELS).
Patent
Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon
TL;DR: The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon--carbon bonds which are found within a diamond crystal lattice.
References
More filters
Journal ArticleDOI
Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
TL;DR: A model is proposed which accounts for the formation and structure of ta-C films on the basis of the compressive stress generated by the shallow implantation of carbon ions, and an optimal range of beam energies between 15 and 70 eV, a high film stress, and a graphitic surface are predicted and confirmed by experimental evidence.
Journal ArticleDOI
Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic‐arc deposition with substrate pulse biasing
George M. Pharr,D. L. Callahan,Shaun D. McAdams,Ting Y. Tsui,Simone Anders,André Anders,Joel W. Ager,Ian G. Brown,C. Singh Bhatia,S. R. P. Silva,John Robertson +10 more
TL;DR: The hardness, elastic modulus, and structure of several amorphous carbon films on silicon prepared by cathodic-arc deposition with substrate pulse biasing have been examined using nanoindentation, energy loss spectroscopy (EELS), and cross-sectional transmission electron microscopy as discussed by the authors.
Journal ArticleDOI
Macroparticle contamination in cathodic arc coatings: generation, transport and control☆
Raymond L. Boxman,S. Goldsmith +1 more
TL;DR: In this paper, it was shown that macroparticles can be accelerated and deflected by the reaction force of back-streaming ions on the underlying microscopic liquid pool and formation from explosive debris.
Journal ArticleDOI
Properties of tetrahedral amorphous carbon prepared by vacuum arc deposition
David R. McKenzie,David A. Muller,B.A. Pailthorpe,Zhen Hua Wang,E. Kravtchinskaia,D. Segal,P.B. Lukins,P.D. Swift,Phil J. Martin,Gehan A. J. Amaratunga,P. H. Gaskell,A. Saeed +11 more
TL;DR: In this article, the structural, optical, electrical and physical properties of amorphous carbon deposited from the filtered plasma stream of a vacuum arc were investigated, and the tetrahedral coordination of the material was confirmed by measurements of stress and plasmon energy as a function of ion energy.
Journal ArticleDOI
Transport of vacuum arc plasmas through magnetic macroparticle filters
TL;DR: In this article, the influence of different filter designs, magnetic field configurations and electric potentials on the filter efficiency was investigated and the occurrence of instabilities in magnetic filters was discussed.