Journal ArticleDOI
Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates
TLDR
In this paper, the authors developed a technique for measuring the thermal conductivity of silicon-on-insulator (SOI) transistors and provided data for layers in wafers fabricated using bond-and-etch-back (BESOI) technology.Abstract:
Self heating diminishes the reliability of silicon-on-insulator (SOI) transistors, particularly those that must withstand electrostatic discharge (ESD) pulses. This problem is alleviated by lateral thermal conduction in the silicon device layer, whose thermal conductivity is not known. The present work develops a technique for measuring this property, and provides data for layers in wafers fabricated using bond-and-etch-back (BESOI) technology. The room-temperature thermal conductivity data decrease with decreasing layer thickness, d s , to a value nearly 40 percent less than that of bulk silicon for d s = 0.42 μm, The agreement of the data with the predictions of phonon transport analysis between 20 and 300 K strongly indicates that phonon scattering on layer boundaries is responsible for a large part of the reduction. The reduction is also due in part to concentrations of imperfections larger than those in bulk samples. The data show that the buried oxide in BESOI wafers has a thermal conductivity that is nearly equal to that of bulk fused quartz. The present work will lead to more accurate thermal simulations of SOI transistors and cantilever MEMS structures.read more
Citations
More filters
Journal ArticleDOI
Enhanced thermoelectric performance of rough silicon nanowires
Allon I. Hochbaum,Renkun Chen,Raul Diaz Delgado,Wenjie Liang,Erik C. Garnett,Mark Najarian,Arun Majumdar,Arun Majumdar,Peidong Yang,Peidong Yang +9 more
TL;DR: In this article, the authors report the electrochemical synthesis of large-area, wafer-scale arrays of rough Si nanowires that are 20-300 nm in diameter.
Journal ArticleDOI
Nanoscale thermal transport
David G. Cahill,Wayne K. Ford,Kenneth E. Goodson,Gerald D. Mahan,Arun Majumdar,Humphrey J. Maris,Roberto Merlin,Simon R. Phillpot +7 more
TL;DR: A review of the literature on thermal transport in nanoscale devices can be found in this article, where the authors highlight the recent developments in experiment, theory and computation that have occurred in the past ten years and summarizes the present status of the field.
Journal Article
Enhanced Thermoelectric Performance in Rough Silicon Nanowires
Renkun Chen,Allon I. Hochbaum,Raul Diaz Delgado,Wenjie Liang,Erik C. Garnett,Mark Najarian,Arun Majumdar,Peidong Yang +7 more
TL;DR: Electrochemical synthesis of large-area, wafer-scale arrays of rough Si nanowires that are 20–300 nm in diameter show promise as high-performance, scalable thermoelectric materials.
Journal ArticleDOI
Semiconductor nanowires for energy conversion.
Allon I. Hochbaum,Peidong Yang +1 more
TL;DR: It is discovered that the thermoconductivity of the silicon nanowires can be significantly reduced due to phonon scattering, pointing to a very promising approach to design better thermoelectrical materials.
Journal ArticleDOI
Emerging challenges and materials for thermal management of electronics
Arden L. Moore,Li Shi +1 more
TL;DR: In this paper, a number of cubic crystals, two-dimensional layered materials, nanostructure networks and composites, molecular layers and surface functionalization, and aligned polymer structures are examined for potential applications as heat spreading layers and substrates, thermal interface materials, and underfill materials in future-generation electronics.
References
More filters
Book
The scattering of electromagnetic waves from rough surfaces
Petr Beckmann,Andre Spizzichino +1 more
TL;DR: The scattering of electromagnetic waves from rough surfaces PDF is available at the online library of the University of Southern California as mentioned in this paper, where a complete collection of electromagnetic wave from rough surface books can be found.
Journal ArticleDOI
Model for Lattice Thermal Conductivity at Low Temperatures
TL;DR: In this article, a phenomenological model is developed to facilitate calculation of lattice thermal conductivities at low temperatures, where the phonon scattering processes can be represented by frequency-dependent relaxation times.
Journal ArticleDOI
The mean free path of electrons in metals
TL;DR: The mean free path of electrons in metals has been studied in this paper, where the authors show that electrons follow a straight line along the path of the electron in the metal atom.
Journal ArticleDOI
Analysis of Lattice Thermal Conductivity
TL;DR: In this paper, an analysis of thermal conductivity is presented which differs from that of Klemens and of Callaway in that it considers explicitly the conduction by both transverse and longitudinal phonons.