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Proceedings ArticleDOI

Tunable lumped components with applications to reconfigurable MEMS filters

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TLDR
A novel design scheme for tunable coplanar waveguide components with applications to compact lumped-element MEMS reconfigurable filters and the main advantages are the very high tunability range, the compactness of the resulting networks and their very wideband response.
Abstract
This paper presents a novel design scheme for tunable coplanar waveguide components with applications to compact lumped-element MEMS reconfigurable filters. Shunt MEMS switches are employed for tuning the values of lumped components frequently encountered in microwave integrated circuits. In particular, shunt capacitors, series inductors and shunt inductive stubs are the main tunable circuit elements utilized in this work. Furthermore, accurate equivalent circuits that include the most important parasitics introduced by the tuning mechanism are provided. Finally, the proposed method is applied to the design and implementation of very compact low-pass and bandpass tunable filters. The very high tunability range, the compactness of the resulting networks and their very wideband response constitute the main advantages of this technique.

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Citations
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Reconfigurable scan-beam single-arm spiral antenna integrated with RF-MEMS switches

TL;DR: In this paper, a reconfigurable rectangular spiral antenna with a set of micro electro mechanical system (MEMS) switches, which are monolithically integrated and packaged onto the same substrate, is presented.
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Miniature and tunable filters using MEMS capacitors

TL;DR: In this paper, a miniature three-pole filter with 8.6% bandwidth based on high-Q MEMS bridge capacitors was developed for tunable bandpass filters at 18-22 GHz.
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Electromechanical considerations in developing low-voltage RF MEMS switches

TL;DR: In this article, the design, fabrication, and testing of a low-actuation voltage Microelectromechanical systems (MEMS) switch for high-frequency applications is described.
Journal ArticleDOI

Microwave filters-applications and technology

TL;DR: This paper describes the development of microwave filter technology from an applications perspective, showing how military applications and the satellite communications industry created demand for low-mass narrow-band low-loss filters with severe specifications on amplitude selectivity and phase linearity led to development of dual-mode waveguide and dielectric-resonator filters.
Journal ArticleDOI

A differential 4-bit 6.5-10-GHz RF MEMS tunable filter

TL;DR: In this article, the authors presented a state-of-the-art RF microelectromechanical systems wideband miniature tunable filter designed for 6.5-10 GHz frequency range.
References
More filters
Journal ArticleDOI

High-isolation CPW MEMS shunt switches. 1. Modeling

TL;DR: In this article, an electromagnetic model for membrane microelectromechanical systems (MEMS) shunt switches for microwave/millimeter-wave applications is presented, where the up-state capacitance can be accurately modeled using three-dimensional static solvers and full-wave solvers are used to predict the current distribution and inductance of the switch.
Journal ArticleDOI

High-isolation CPW MEMS shunt switches. 2. Design

TL;DR: In this article, the LC series resonance of the shunt switch was used to tune two and four-bridge "cross" switches from 10 to 40 GHz with an insertion loss of less than 0.3-0.6 dB, a return loss below -20 dB from 22 to 38 GHz in the up state, and a downstate isolation of 45-50 dB with only 1.5 pF of downstate capacitance.
Proceedings ArticleDOI

Design of low actuation voltage RF MEMS switch

TL;DR: In this article, a low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported that utilize highly compliant serpentine spring folded suspensions together with large area capacitive actuators to achieve low actuation voltages while maintaining sufficient off-state isolation.
Proceedings ArticleDOI

Characteristics of micromachined switches at microwave frequencies

TL;DR: In this paper, the fundamental characteristics of micromechanical membrane switches operating at microwave frequencies are discussed and the construction and theory of operation of capacitive membrane switches is reviewed. And the inherent advantages of these switches relative to semiconductor switches are discussed.
Proceedings ArticleDOI

MEMS devices for high isolation switching and tunable filtering

TL;DR: In this article, resonant capacitive microelectromechanical switches and their possible applications in tunable filtering are discussed, where single switches with a down capacitance of 2.9 pF and inductive sections of 3 to 50 pH are demonstrated.
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