Proceedings ArticleDOI
MEMS devices for high isolation switching and tunable filtering
Dimitrios Peroulis,S.P. Pacheco,Kamal Sarabandi,P.B. Katehi +3 more
- Vol. 2, pp 1217-1220
TLDR
In this article, resonant capacitive microelectromechanical switches and their possible applications in tunable filtering are discussed, where single switches with a down capacitance of 2.9 pF and inductive sections of 3 to 50 pH are demonstrated.Abstract:
This paper presents resonant capacitive microelectromechanical switches and their possible applications in tunable filtering. Single switches with a down capacitance of 2.9 pF and inductive sections of 3 to 50 pH are demonstrated, resulting in resonant frequencies from 13 to 54 GHz. Designs of resonant switches connected in parallel are also implemented with major advantages in isolation and bandwidth. Finally, tunable filters using these switches are discussed.read more
Citations
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Journal ArticleDOI
RF MEMS switches and switch circuits
TL;DR: In this paper, the authors concentrate on electrostatic switches at 0.1-100 GHz with high reliability (100 million to 10 billion cycles) and wafer-scale manufacturing techniques.
Journal ArticleDOI
Electromechanical considerations in developing low-voltage RF MEMS switches
TL;DR: In this article, the design, fabrication, and testing of a low-actuation voltage Microelectromechanical systems (MEMS) switch for high-frequency applications is described.
Journal ArticleDOI
MEMS for wireless communications: 'from RF-MEMS components to RF-MEMS-SiP'
TL;DR: In this article, the progress in RF-MEMS from a device and integration perspective is reviewed, and the worldwide state-of-the-art of RFMEMS devices including switches, variable capacitors, resonators and filters are described.
Journal ArticleDOI
High- $Q$ Tunable Microwave Cavity Resonators and Filters Using SOI-Based RF MEMS Tuners
TL;DR: In this paper, the authors present the modeling, design, fabrication, and measurement of microelectromechanical systems-enabled continuously tunable evanescent-mode electromagnetic cavity resonators and filters with very high unloaded quality factors (Qu).
Proceedings ArticleDOI
Tunable lumped components with applications to reconfigurable MEMS filters
TL;DR: A novel design scheme for tunable coplanar waveguide components with applications to compact lumped-element MEMS reconfigurable filters and the main advantages are the very high tunability range, the compactness of the resulting networks and their very wideband response.
References
More filters
Proceedings ArticleDOI
Characteristics of micromachined switches at microwave frequencies
C.L. Goldsmith,John N. Randall,S. Eshelman,Tsen-Hwang Lin,David Denniston,S. Chen,B. Norvell +6 more
TL;DR: In this paper, the fundamental characteristics of micromechanical membrane switches operating at microwave frequencies are discussed and the construction and theory of operation of capacitive membrane switches is reviewed. And the inherent advantages of these switches relative to semiconductor switches are discussed.
Proceedings ArticleDOI
Micromechanical electrostatic K-band switches
TL;DR: In this paper, two novel designs of micromechanical capacitive switches using serpentine and cantilever springs for low actuation voltage applications are reported, which also incorporate an electrode situated above the switching structure in order to provide system stability.
Proceedings ArticleDOI
Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators
TL;DR: In this article, a series mounted MEMS tunable capacitor in a CPW line is reported, where an electrothermal actuator has been used for driving the top plate of the parallel plate capacitor.
Proceedings ArticleDOI
30 GHz tuned MEMS switches
TL;DR: In this paper, the authors demonstrate the use of resonant tuning in high-isolation reflective MEMS electrostatic switches, which can achieve higher isolation and a lower pulldown voltage than a comparable single element switch.
Proceedings ArticleDOI
Microelectromechanical K-Band Switching Circuits
S.P. Pacheco,Linda P. B. Katehi +1 more
TL;DR: In this article, two single-pole single-throw (SPST) K-band circuit designs incorporating low-loss microelectromechanical systems (MEMS) microwave shunt switches are reported.