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Enrique Iborra

Researcher at Technical University of Madrid

Publications -  156
Citations -  3485

Enrique Iborra is an academic researcher from Technical University of Madrid. The author has contributed to research in topics: Thin film & Resonator. The author has an hindex of 27, co-authored 156 publications receiving 3060 citations. Previous affiliations of Enrique Iborra include ETSI & Polytechnic University of Puerto Rico.

Papers
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Colossal Ionic Conductivity at Interfaces of Epitaxial ZrO2:Y2O3/SrTiO3 Heterostructures

TL;DR: It is proposed that the atomic reconstruction at the interface between highly dissimilar structures (such as fluorite and perovskite) provides both a large number of carriers and a high-mobility plane, yielding colossal values of the ionic conductivity.
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Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications

TL;DR: In this article, the suitability of piezoelectric aluminium nitride (AlN) films deposited by RF sputtering as the actuating element in microelectromechanical system (MEMS) devices was investigated.
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SAW characteristics of AlN films sputtered on silicon substrates.

TL;DR: The electroacoustic responses of the SAW filters were fitted by computations based on a simple circuital model that takes into account parasitic effects such as airborne electromagnetic coupling and conduction through the substrate, providing accurate values of the electromechanical coupling factor k2 even for devices with poor characteristics.
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Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films

TL;DR: In this article, the influence of sputtering parameters on the preferred orientation of polycrystalline aluminum nitride thin films was studied, and different mechanisms influencing the preferred orientations of the films were considered, especially the transfer of energy to the adatoms on the substrate by particle bombardment.