E
Enrique Iborra
Researcher at Technical University of Madrid
Publications - 156
Citations - 3485
Enrique Iborra is an academic researcher from Technical University of Madrid. The author has contributed to research in topics: Thin film & Resonator. The author has an hindex of 27, co-authored 156 publications receiving 3060 citations. Previous affiliations of Enrique Iborra include ETSI & Polytechnic University of Puerto Rico.
Papers
More filters
Journal ArticleDOI
Colossal Ionic Conductivity at Interfaces of Epitaxial ZrO2:Y2O3/SrTiO3 Heterostructures
Javier Garcia-Barriocanal,Alberto Rivera-Calzada,Maria Varela,Zouhair Sefrioui,Enrique Iborra,Carlos León,Stephen J. Pennycook,Jacobo Santamaria +7 more
TL;DR: It is proposed that the atomic reconstruction at the interface between highly dissimilar structures (such as fluorite and perovskite) provides both a large number of carriers and a high-mobility plane, yielding colossal values of the ionic conductivity.
Journal ArticleDOI
Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Yong Qing Fu,Yong Qing Fu,Jack Luo,Nam-Trung Nguyen,Anthony J. Walton,Andrew J. Flewitt,Xiaotao Zu,Yifan Li,Glen McHale,Allan Matthews,Enrique Iborra,Hejun Du,William I. Milne,William I. Milne +13 more
TL;DR: In this article, the authors acknowledge support from the Innovative electronic manufacturing research centre (IeMRC) through the EPSRC funded flagship project SMART MICROSYSTEMS.
Journal ArticleDOI
Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications
TL;DR: In this article, the suitability of piezoelectric aluminium nitride (AlN) films deposited by RF sputtering as the actuating element in microelectromechanical system (MEMS) devices was investigated.
Journal ArticleDOI
SAW characteristics of AlN films sputtered on silicon substrates.
TL;DR: The electroacoustic responses of the SAW filters were fitted by computations based on a simple circuital model that takes into account parasitic effects such as airborne electromagnetic coupling and conduction through the substrate, providing accurate values of the electromechanical coupling factor k2 even for devices with poor characteristics.
Journal ArticleDOI
Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films
TL;DR: In this article, the influence of sputtering parameters on the preferred orientation of polycrystalline aluminum nitride thin films was studied, and different mechanisms influencing the preferred orientations of the films were considered, especially the transfer of energy to the adatoms on the substrate by particle bombardment.