K
Kenneth L. Blaedel
Researcher at Lawrence Livermore National Laboratory
Publications - 23
Citations - 451
Kenneth L. Blaedel is an academic researcher from Lawrence Livermore National Laboratory. The author has contributed to research in topics: Extreme ultraviolet lithography & Reticle. The author has an hindex of 12, co-authored 23 publications receiving 437 citations. Previous affiliations of Kenneth L. Blaedel include Lawrence Berkeley National Laboratory & Columbia University.
Papers
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Proceedings ArticleDOI
Fabrication of the NuSTAR flight optics
William W. Craig,Hongjun An,Kenneth L. Blaedel,Finn Erland Christensen,Todd A. Decker,Anne Fabricant,Jeff Gum,Charles J. Hailey,Layton Hale,Carsten B. Jensen,Jason E. Koglin,Kaya Mori,Melanie Nynka,Michael J. Pivovaroff,Marton V. Sharpe,Marcela Stern,Gordon Tajiri,William W. Zhang +17 more
TL;DR: The NuSTAR flight optics modules are glass-graphite-epoxy-composite structures to be employed for the first time in space-based X-ray optics by NuSTAR, a NASA Small Penetrator Space Explorer schedule for launch in February 2012.
Proceedings ArticleDOI
System integration and performance of the EUV engineering test stand
Daniel A. Tichenor,Avijit K. Ray-Chaudhuri,William C. Replogle,Richard H. Stulen,Glenn D. Kubiak,Paul D. Rockett,Leonard E. Klebanoff,Karen J. Jefferson,Alvin H. Leung,John B. Wronosky,Layton C. Hale,Henry N. Chapman,John S. Taylor,James A. Folta,Claude Montcalm,Regina Soufli,Eberhard Spiller,Kenneth L. Blaedel,Gary E. Sommargren,Donald W. Sweeney,Patrick P. Naulleau,Kenneth A. Goldberg,Eric M. Gullikson,Jeffrey Bokor,Phillip J. Batson,David Attwood,Keith H. Jackson,Scott Daniel Hector,Charles W. Gwyn,Pei-yang Yan +29 more
TL;DR: The Engineering Test Stand (ETS) as mentioned in this paper is a developmental lithography tool designed to demonstrate full-field EUV imaging and provide data for commercial tool development, and it is configured using a developmental projection system, while fabrication of an improved projection system proceeds in parallel.
Proceedings ArticleDOI
The Nuclear Spectroscopic Telescope Array (NuSTAR): Optics Overview and Current Status
Charles J. Hailey,Hongjun An,Kenneth L. Blaedel,Nicolai Brejnholt,Finn Erland Christensen,William W. Craig,Todd A. Decker,Melanie Doll,Jeff Gum,Jason E. Koglin,Carsten P. Jensen,Layton Hale,Kaya Mori,Michael J. Pivovaroff,Marton V. Sharpe,Marcela Stern,Gordon Tajiri,William W. Zhang +17 more
TL;DR: The Nuclear Spectroscopic Telescope Array (NuSTAR) is a NASA Small Explorer mission scheduled for launch in February 2012 as discussed by the authors, which will deploy two imaging CdZnTe spectrometers in the 6-79 keV energy band.
Journal ArticleDOI
First lithographic results from the extreme ultraviolet Engineering Test Stand
Henry N. Chapman,Avijit K. Ray-Chaudhuri,Daniel A. Tichenor,William C. Replogle,Richard H. Stulen,Glenn D. Kubiak,Paul D. Rockett,Leonard E. Klebanoff,Donna J. O'Connell,Alvin H. Leung,Karen L. Jefferson,John B. Wronosky,J. Taylor,Layton C. Hale,Kenneth L. Blaedel,Eberhard Spiller,G. E. Sommargren,James A. Folta,Donald W. Sweeney,E. M. Gullikson,Patrick P. Naulleau,Kenneth A. Goldberg,Jeffrey Bokor,David Attwood,Uwe Mickan,Ralph M. Hanzen,Eric M. Panning,Pei-yang Yan,Charles W. Gwyn,Sang H. Lee +29 more
TL;DR: The Extreme ultraviolet Engineering Test Stand (ETS) as mentioned in this paper is a step-and-scan lithography tool that operates at a wavelength of 13.4 nm and is used to demonstrate full-field EUV imaging and acquire system learning for equipment manufacturers to develop commercial tools.
Proceedings ArticleDOI
NuSTAR Hard X-ray Optics Design and Performance
Jason E. Koglin,Hongjun An,Kenneth L. Blaedel,Nicolai Brejnholt,Finn Erland Christensen,William W. Craig,Todd A. Decker,Charles J. Hailey,Layton C. Hale,Fiona A. Harrison,Carsten P. Jensen,Kristin K. Madsen,Kaya Mori,Michael J. Pivovaroff,Gordon Tajiri,William W. Zhang +15 more
TL;DR: NuSTAR as mentioned in this paper is a NASA satellite mission scheduled for launch in 2011 using focusing optics with multilayer coating for enhanced reflectivity of hard X-rays (6-79 keV), which will provide a combination of clarity, sensitivity and spectral resolution surpassing the largest observatories in this band by orders of magnitude.