Kenneth P. Rodbell

TL;DR: In this paper, ground-based measurements of the cosmic-ray induced neutron flux and its energy distribution have been made at several locations across the United States using an extended energy Bonner sphere spectrometer.

TL;DR: In this article, the authors describe the development of an electroplating process for the copper network, dual-damascence chem-mech polishing (CMP), and effective liner material for copper diffusion barrier and adhesion promotion.

TL;DR: In this paper, a model based on grain boundary energy in the fine-grained as-deposited films providing the underlying energy density which drives abnormal grain growth is presented.

TL;DR: In this article, a method of chem-mech polishing an article, preferably an electronic component substrate, is described. And the method includes the following steps; obtaining an article having at least two features thereon or therein which have a different etch rate with respect to a particular etchant; and contacting the article with a polishing pad while contacting the substrate with a slurry containing the etchant wherein the slurry includes abrasive particles.

TL;DR: In this article, experimental data showed that low energy (<2 MeV) proton irradiation can upset exploratory 65 nm node, silicon-on-insulator circuits and suggested that track structures need to be understood and effectively modeled, especially for small, modern devices.