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Toshio Kamiya

Researcher at Tokyo Institute of Technology

Publications -  394
Citations -  41346

Toshio Kamiya is an academic researcher from Tokyo Institute of Technology. The author has contributed to research in topics: Amorphous solid & Thin film. The author has an hindex of 76, co-authored 383 publications receiving 38115 citations.

Papers
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Journal ArticleDOI

Carrier transport in transparent oxide semiconductor with intrinsic structural randomness probed using single-crystalline InGaO3(ZnO)5 films

TL;DR: In this article, the authors investigated carrier transport in a crystalline oxide semiconductor InGaO3(ZnO)5 using single-crystalline thin films and showed that when carrier concentration is less than 2×1018cm−3, logarithm of electrical conductivity decreases in proportion to T−1∕4 and room-temperature Hall mobility was as low as ∼1cm2(Vs)−1.
Patent

Amorphous oxide and field effect transistor

TL;DR: In this article, a novel amorphous oxide applicable to an active layer of a TFT is provided, which consists of microcrystals and can be applied to any TFT.
Journal ArticleDOI

High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering

TL;DR: In this paper, a-IGZO channels were fabricated using amorphous indium gallium zinc oxide channels by rf-magnetron sputtering at room temperature.
Patent

Natural-superlattice homologous single crystal thin film, method for preparation thereof, and device using said single crystal thin film

TL;DR: A natural superlattice homologous single crystal thin film, characterized in that it comprises a composite oxide which is represented by the formula M1M2O3(ZnO)m, is a natural number of 1 or more as discussed by the authors.
Patent

Field effect transistor manufacturing method

TL;DR: In this paper, the authors proposed a novel method for manufacturing a field effect transistor. But this method required that ultraviolet rays are irradiated on the substrate surface in an ozone atmosphere, plasma is irradiated onto the substrate surfaces, or the surface is cleaned by a chemical solution containing hydrogen peroxide.