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Showing papers in "Micro and Nano Systems Letters in 2017"


Journal ArticleDOI
TL;DR: This review provides a summ ary of radio frequency (RF) power harvesting technologies in order to serve as a guide for the design of RF energy harvesting units.
Abstract: Wireless power transmission was conceptualized nearly a century ago. Certain achievements made to date have made power harvesting a reality, capable of providing alternative sources of energy. This review provides a summ ary of radio frequency (RF) power harvesting technologies in order to serve as a guide for the design of RF energy harvesting units. Since energy harvesting circuits are designed to operate with relatively small voltages and currents, they rely on state-of-the-art electrical technology for obtaining high efficiency. Thus, comprehensive analysis and discussions of various designs and their tradeoffs are included. Finally, recent applications of RF power harvesting are outlined.

185 citations


Journal ArticleDOI
TL;DR: This review focuses on merits and demerits of several types of EV isolation methods, and provides examples of how to diagnose disease by exploiting information obtained by analysis of EVs.
Abstract: Extracellular vesicles (EVs) are small membrane-bound bodies that are released into extracellular space by diverse cells, and are found in body fluids like blood, urine and saliva. EVs contain RNA, DNA and proteins, which can be biomarkers for diagnosis. EVs can be obtained by minimally-invasive biopsy, so they are useful in disease diagnosis. High yield and purity contribute to precise diagnosis of disease, but damaged EVs and impurities can cause confu sed results. However, EV isolation methods have different yields and purities. Furthermore, the isolation method that is most suitable to maximize EV recovery efficiency depends on the experimental conditions. This review focuses on merits and demerits of several types of EV isolation methods, and provides examples of how to diagnose disease by exploiting information obtained by analysis of EVs.

53 citations


Journal ArticleDOI
TL;DR: In this article, the scanning arrangement, trajectory, and actuation mechanism of endoscopic microscanners and their endomicroscopic applications will be overviewed.
Abstract: MEMS laser scanning enables the miniaturization of endoscopic catheters for advanced endomicroscopy such as confocal microscopy, multiphoton microscopy, optical coherence tomography, and many other laser scanning microscopy. These advanced biomedical imaging modalities open a great potential for in vivo optical biopsy without surgical excision. They have huge capabilities for detecting on-demand early stage cancer with non-invasiveness. In this article, the scanning arrangement, trajectory, and actuation mechanism of endoscopic microscanners and their endomicroscopic applications will be overviewed.

51 citations


Journal ArticleDOI
TL;DR: In this paper, the effect of hydroxylamine (NH2OH) in 20-wt% KOH solution was investigated and the concentration of NH2OH was varied from 0 to 20% and the etching was carried out at 75°C.
Abstract: Anisotropic wet etching is a most widely employed for the fabrication of MEMS/NEMS structures using silicon bulk micromachining The use of Si{110} in MEMS is inevitable when a microstructure with vertical sidewall is to be fabricated using wet anisotropic etching In most commonly employed etchants (ie TMAH and KOH), potassium hydroxide (KOH) exhibits higher etch rate and provides improved anisotropy between Si{111} and Si{110} planes In the manufacturing company, high etch rate is demanded to increase the productivity that eventually reduces the cost of end product In order to modify the etching characteristics of KOH for the micromachining of Si{110}, we have investigated the effect of hydroxylamine (NH2OH) in 20 wt% KOH solution The concentration of NH2OH is varied from 0 to 20% and the etching is carried out at 75 °C The etching characteristics which are studied in this work includes the etch rates of Si{110} and silicon dioxide, etched surface morphology, and undercutting at convex corners The etch rate of Si{110} in 20 wt% KOH + 15% NH2OH solution is measured to be four times more than that of pure 20 wt% KOH Moreover, the addition of NH2OH increases the undercutting at convex corners and enhances the etch selectivity between Si and SiO2

39 citations


Journal ArticleDOI
TL;DR: In this paper, two novel electrode design considerations to satisfy two very important aspects of EWOD operation are reported; highly consistent volume of generated droplets and highly improved accuracy in the generated droplet volume.
Abstract: This letter reports two novel electrode design considerations to satisfy two very important aspects of EWOD operation—(1) Highly consistent volume of generated droplets and (2) Highly improved accuracy in the generated droplet volume. Considering the design principles investigated two novel designs were proposed; L-junction electrode design to offer high throughput droplet generation and Y-junction electrode design to split a droplet very fast while maintaining equal volume of each part. Devices of novel designs were fabricated and tested, and the results are compared with those of conventional approach. It is demonstrated that inaccuracy and inconsistency of droplet volume dispensed in the device with novel electrode designs are as low as 0.17 and 0.10%, respectively, while those of conventional approach are 25 and 0.76%, respectively. The dispensing frequency is enhanced from 4 to 9 Hz by using the novel design.

30 citations


Journal ArticleDOI
TL;DR: In this article, the authors presented a MEMS pressure sensor integrated with a readout circuit on a chip for on-chip signal processing, which is formed on a CMOS chip by using a post-CMOS MEMS processes.
Abstract: In this paper, we presents a MEMS pressure sensor integrated with a readout circuit on a chip for an on-chip signal processing. The capacitive pressure sensor is formed on a CMOS chip by using a post-CMOS MEMS processes. The proposed device consists of a sensing capacitor that is square in shape, a reference capacitor and a readout circuitry based on a switched-capacitor scheme to detect capacitance change at various environmental pressures. The readout circuit was implemented by using a commercial 0.35 μm CMOS process with 2 polysilicon and 4 metal layers. Then, the pressure sensor was formed by wet etching of metal 2 layer through via hole structures. Experimental results show that the MEMS pressure sensor has a sensitivity of 11 mV/100 kPa at the pressure range of 100–400 kPa.

23 citations


Journal ArticleDOI
TL;DR: In this article, the correlation among the Pt T sensor, micro heater, and the working temperature was investigated, which was linear proportional relation expressed as the equation: T2 = 6.466R1-642.8, where T2 is the temperature of the micro heater and R1 is the electrical resistance of the Pt sensor.
Abstract: Pt thin film temperature sensors (Pt T sensors) are embedded in micro gas sensors to measure and control the working temperature. We characterized electrical resistances of Pt T sensors and micro heaters with temperature changing in the oven and by Joule heating. In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation among the Pt T sensor, micro heater, and the working temperature, which was linear proportional relation expressed as the equation: T2 = 6.466R1–642.8, where T2 = temperature of the Pt micro heater and R1 = the electrical resistance of the Pt T sensor. As the error by physically separated gap between Pt T sensor and micro heater calibrated, measuring and controlling temperature of micro heater in micro gas sensors were possible through the Pt T sensors. For the practical use of Pt T sensor in micro gas sensor, the gas sensing properties of fabricated micro gas sensors to 25 ppm CO and 1 ppm HCHO gases were characterized.

22 citations


Journal ArticleDOI
TL;DR: In this paper, the effect of temperature on a miniaturized microbial fuel cell with Geobacter sulfurreducens dominated mixed inoculum is investigated for the first time, and the experiment demonstrates that the optimal temperature for the miniaturised MFC is 322-326-K (49-53°C).
Abstract: A microbial fuel cell (MFC) is a bioinspired energy converter which directly converts biomass into electricity through the catalytic activity of a specific species of bacteria. The effect of temperature on a miniaturized microbial fuel cell with Geobacter sulfurreducens dominated mixed inoculum is investigated in this paper for the first time. The miniaturized MFC warrants investigation due to its small thermal mass, and a customized setup is built for the temperature effect characterization. The experiment demonstrates that the optimal temperature for the miniaturized MFC is 322–326 K (49–53 °C). When the temperature is increased from 294 to 322 K, a remarkable current density improvement of 282% is observed, from 2.2 to 6.2 Am−2. Furthermore, we perform in depth analysis on the effect of temperature on the miniaturized MFC, and found that the activation energy for the current limiting mechanism of the MFC is approximately between 0.132 and 0.146 eV, and the result suggest that the electron transfer between cytochrome c is the limiting process for the miniaturized MFC.

18 citations


Journal ArticleDOI
TL;DR: In this paper, a single layer of a reactive nanocomposite made of intermixed metal nanoparticles is proposed, instead of multilayer systems, which can be used to join heterogeneous materials without applying too much thermal stress to the whole device.
Abstract: Highly reactive integrated material systems have recently gained attention, as they promise a feasible tool for heterogeneous integration of micro electromechanical systems. As integrated energy sources they can be used to join heterogeneous materials without applying too much thermal stress to the whole device. An alternative approach is proposed, comprising a single layer of a reactive nanocomposite made of intermixed metal nanoparticles, instead of multilayer systems. In this study the development of the reactive nanocomposite from choice of materials through processing steps, handling and application methods are described. Eventually the results of the experiments upon the reactivity of the nanocomposites and the feasibility for bonding applications are presented. Analysis of the composites was performed by phase-analysis using x-ray diffraction and reaction propagation analysis by high-speed imaging. Composition of products was found to vary with initial particle sizes. Beside of other phases, the dominant phase was intermetallic NiAl.

17 citations


Journal ArticleDOI
TL;DR: In this paper, a flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications is presented.
Abstract: This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it with ICs. The d33 piezoelectric mode was applied to achieve a large output voltage by using inter-digitated electrodes, and the PZT thin film on polyimide layer has a remnant polarization and coercive filed of approximately 2P r = 47.9 μC/cm2 and 2E c = 78.8 kV/cm, respectively. The relative dielectric constant was 900. The fabricated micro-electromechanical systems energy harvester generated output voltages of 1.2 V and output power of 117 nW at its optimal resistive load of 6.6 MΩ from its resonant frequency of 97.8 Hz with an acceleration of 5 m/s2.

14 citations


Journal ArticleDOI
TL;DR: In this paper, the selective preconcentration of a muc1 gene fragment as human breast cancer marker and a lamp-2 gene fragment was demonstrated as the cause of Danon disease in paper-based ion concentration polarization (ICP) devices.
Abstract: Recently, novel biomolecules separation and detection methods based on ion concentration polarization (ICP) phenomena have been extensively researched due to its high amplification ratio and high-speed accumulation. Despite of these bright advances, the fabrication of conventional ICP devices still have complicated and times-consuming tasks. As an alternative platform, a paper have been recently used for the identical ICP operations. In this work, we demonstrated the selective preconcentration of a muc1 gene fragment as human breast cancer marker and a lamp-2 gene fragment as the cause of Danon disease in paper-based ICP devices. As a result, these two DNA fragments were successfully concentrated up to ~60 fold at different location in a single paper-channel. The device would be a promising platform for point-of-care device due to an economic fabrication, the easy extraction of concentrated sample and an easy disposability.

Journal ArticleDOI
TL;DR: In this paper, a simple and scalable fluidic assembly approach is presented, in which bundles of single-walled carbon nanotubes (SWCNTs) are selectively aligned and deposited by directionally controlled dip-coating and solvent evaporation processes.
Abstract: We present a simple and scalable fluidic-assembly approach, in which bundles of single-walled carbon nanotubes (SWCNTs) are selectively aligned and deposited by directionally controlled dip-coating and solvent evaporation processes. The patterned surface with alternating regions of hydrophobic polydimethyl siloxane (PDMS) (height ~ 100 nm) strips and hydrophilic SiO2 substrate was withdrawn vertically at a constant speed (~3 mm/min) from a solution bath containing SWCNTs (~0.1 mg/ml), allowing for directional evaporation and subsequent selective deposition of nanotube bundles along the edges of horizontally aligned PDMS strips. In addition, the fluidic assembly was applied to fabricate a field effect transistor (FET) with highly oriented SWCNTs, which demonstrate significantly higher current density as well as high turn-off ratio (T/O ratio ~ 100) as compared to that with randomly distributed carbon nanotube bundles (T/O ratio ~ <10).

Journal ArticleDOI
TL;DR: In this article, a dual-axis accelerometer that consists of a liquid metal droplet in a cone-shaped channel and an electrode layer with four Nichrome electrodes is presented.
Abstract: This paper presents a novel dual-axis accelerometer that consists of a liquid metal droplet in a cone-shaped channel and an electrode layer with four Nichrome electrodes. The sensor uses the advantages of the liquid metal droplet (i.e., high surface tension, electrical conductivity, high density, and deformability). The cone-shaped channel imposes a restoring force on the liquid metal droplet. We conducted simulation tests to determine the appropriate design specifications of the cone-shaped channel. Surface modifications to the channel enhanced the nonwetting performance of the liquid metal droplet. The performances of the sensor were analyzed by a tilting test. When the acceleration was applied along the axial direction, the device showed ~6 kΩ/g of sensitivity and negligible crosstalk between the X- and Y-axes. In a diagonal direction test, the device showed ~4 kΩ/g of sensitivity.

Journal ArticleDOI
TL;DR: In this paper, a piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams is presented, which allows load-sharing at highg preventing structural breakage.
Abstract: We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4 mm × 1.4 mm × 0.51 mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068 mV/g/V under 5 V applied and the resolutions are 24.2, 29.9 and 25.4 g, respectively.

Journal ArticleDOI
TL;DR: The enhanced neuronal attachment and neurite outgrowth on the nanostructured microprobes occurred in the absence of an adhesive coating, such as poly-l-lysine, and so may be useful for implantable devices for long-term use.
Abstract: Microprobes are used to repair neuronal injury by recording electrical signals from neuronal cells around the surface of the device. Following implantation into the brain, the immune response results in formation of scar tissue around the microprobe. However, neurons must be in close proximity to the microprobe to enable signal recording. A common reason for failure of microprobes is impaired signal recording due to scar tissue, which is not related to the microprobe itself. Therefore, the device–cell interface must be improved to increase the number of neurons in contact with the surface. In this study, we developed nanostructured SU-8 microprobes to support neuronal growth. Nanostructures of 200 nm diameter and depth were applied to the surface of microprobes, and the attachment and neurite outgrowth of PC12 cells on the microprobes were evaluated. Neuronal attachment and neurite outgrowth on the nanostructured microprobes were significantly greater than those on non-nanostructured microprobes. The enhanced neuronal attachment and neurite outgrowth on the nanostructured microprobes occurred in the absence of an adhesive coating, such as poly-l-lysine, and so may be useful for implantable devices for long-term use. Therefore, nanostructured microprobes can be implanted without adhesive coating, which can cause problems in vivo over the long term.

Journal ArticleDOI
TL;DR: In this paper, a 3D folding-paper-based ICP preconcentrator for plug extraction without the dispersion effect is presented, which is printed on a cellulose paper with pre-patterned hydrophobic wax.
Abstract: Ion concentration polarization (ICP) has been widely studied for collecting target analytes as it is a powerful preconcentrator method employed for charged molecules. Although the method is quite robust, simple, cheap, and yields a high preconcentration factor, a major hurdle to be addressed is extracting the preconcentrated samples without dispersing the plug. This study investigates a 3D folding-paper-based ICP preconcentrator for preconcentrated plug extraction without the dispersion effect. The ICP preconcentrator is printed on a cellulose paper with pre-patterned hydrophobic wax. To extract and isolate the preconcentration plug with minimal dispersion, a 3D pop-up structure is fabricated via water drain, and a preconcentration factor of 300-fold for 10 min is achieved. By optimizing factors such as the electric field, water drain, and sample volume, the technique was enhanced by facilitating sample preconcentration and isolation, thereby providing the possibility for extensive applications in analytical devices such as lateral flow assays and FTAR cards.

Journal ArticleDOI
TL;DR: The tube nozzle electrospinning (TNE) process has been used, where an array of micronozzles on the sidewall of a plastic tube are used as spinnerets as discussed by the authors.
Abstract: High throughput nanomanufacturing of photopatternable nanofibers and subsequent photopatterning is reported. For the production of high density nanofibers, the tube nozzle electrospinning (TNE) process has been used, where an array of micronozzles on the sidewall of a plastic tube are used as spinnerets. By increasing the density of nozzles, the electric fields of adjacent nozzles confine the cone of electrospinning and give a higher density of nanofibers. With TNE, higher density nozzles are easily achievable compared to metallic nozzles, e.g. an inter-nozzle distance as small as 0.5 cm and an average semi-vertical repulsion angle of 12.28° for 8-nozzles were achieved. Nanofiber diameter distribution, mass throughput rate, and growth rate of nanofiber stacks in different operating conditions and with different numbers of nozzles, such as 2, 4 and 8 nozzles, and scalability with single and double tube configurations are discussed. Nanofibers made of SU-8, photopatternable epoxy, have been collected to a thickness of over 80 μm in 240 s of electrospinning and the production rate of 0.75 g/h is achieved using the 2 tube 8 nozzle systems, followed by photolithographic micropatterning. TNE is scalable to a large number of nozzles, and offers high throughput production, plug and play capability with standard electrospinning equipment, and little waste of polymer.

Journal ArticleDOI
TL;DR: In this paper, a nano-scale sub-10nm silicon nanogratings with simple and reliable features were demonstrated by employing a repetitive wet-chemical oxidation and etching technique.
Abstract: Despite many efforts to create nanogratings to exploit exceptionally enhanced nano-sized effects, realizing sub-10 nm nanogratings on a large area still remains a great challenge. Herein, we demonstrate fabrication of an inch-scale sub-10 nm nanogratings with simple and reliable features, by employing a repetitive wet-chemical oxidation and etching technique. We found that a few atomic layers of the silicon surface are naturally oxidized in a nitric acid (HNO3) solution, which enables the surface of the silicon to be etched with 1.0 nm resolution by selectively removing the oxide layers. By combining this high-precision etching technique with silicon nanogratings previously prepared by conventional methods, we successfully demonstrated a sub-10 nm silicon nanogratings on an inch-scale wafer.

Journal ArticleDOI
TL;DR: Results of this study have demonstrated that the length of the herringbone’s apex and the ratio of the heights of the flat channel and theHerringbone structure were crucial parameters influencing positioning of cells at 100 μl/h flow rate.
Abstract: Controlling cells’ movement is an important technique in biological analysis that is performed within a microfluidic system. Many external forces are utilized for manipulation of cells, including their position in the channel. These forces can effectively control cells in a desired manner. Most of techniques used to manipulate cells require sophisticated set-ups and equipment to generate desired effect. The exception to this is the use of hydrodynamic force. In this study, a series of continuously varying herringbone structures is proposed for positioning cells in a microfluidic channel using hydrodynamic force. This structure was experimentally developed by changing parameters, such as the length of the herringbone’s apex, the length of the herringbone’s base and the ratio of the height of the flat channel to the height of the herringbone structure. Results of this study, have demonstrated that the length of the herringbone’s apex and the ratio of the heights of the flat channel and the herringbone structure were crucial parameters influencing positioning of cells at 100 μl/h flow rate. The final design was fixed at 170 and 80 μm for the length of herringbone’s apex and the length of herringbone’s base, respectively. The average position of cells in this device was 34 μm away from the side wall in a 200 μm wide channel. Finally, to substantiate a practical application of the herringbone structure for positioning, cells were randomly introduced into a microfluidic device, containing an array of trapping structures together with a series of herringbone structures along the channel. The cells were moved toward the trapping structure by the herringbone structure and the trapping efficiency was increased. Therefore, it is anticipated that this device will be utilized to continuously control cells’ position without application of external forces.

Journal ArticleDOI
TL;DR: In this article, a facile method for the preparation of polyethyleneglycol diacrylate (PEG-DA) hydrogels with plasmonic gold (Au) nanospheres incorporated for various biological and chemical sensing applications is presented.
Abstract: We present a facile method for the preparation of polyethyleneglycol diacrylate (PEG-DA) hydrogels with plasmonic gold (Au) nanospheres incorporated for various biological and chemical sensing applications. Plasmonic Au nanospheres were prepared ex situ using the standard citrate reduction method with an average diameter of 3.5 nm and a standard deviation of 0.5 nm, and evaluated for their surface functionalization process intended for uniform dispersion in polymer matrices. UV–Visible spectroscopy reveals the existence of plasmonic properties for pristine Au nanospheres, functionalized Au nanospheres, and PEG-DA with uniformly dispersed functionalized Au nanospheres (hybrid Au/PEG-DA hydrogels). Hybrid Au/PEG-DA hydrogels examined by using Fourier transform infra-red spectroscopy (FT-IR) exhibit the characteristic bands at 1635, 1732 and 2882 cm−1 corresponding to reaction products of OH− originating from oxidized product of citrate, –C=O stretching from ester bond, and C–H stretching of PEG-DA, respectively. Thermal studies of hybrid Au/PEG-DA hydrogels show three-stage decomposition with their stabilities up to 500 °C. Optical properties and thermal stabilities associated with the uniform dispersion of Au nanospheres within hydrogels reported herein will facilitate various biological and chemical sensing applications.

Journal ArticleDOI
TL;DR: In this article, a flexible/stretchable film with an array of high-density multifunctional micro-sensors and actuators was used to diagnose atrial fibrillation.
Abstract: Cardiovascular disease is a very serious disease which results in about 30% of all global mortality. Atrial fibrillation (AF) causes rapid and irregular contractions resulting in stroke and cardiac arrest. AF is caused by abnormality of the heartbeat controlling electrical signal. Catheter ablation (CA) is often used to treat and remove the abnormal electrical source from the heart but it has limitations in sensing capability and spatial coverage. To overcome the limitations of the CA, new devices for improving the spatial capability have been reported. One of the most impressive methods is wrapping the heart surface with a flexible/stretchable film with an array of high-density multifunctional micro-sensors and actuators. With this technique, the overall heart surface may be diagnosed in real time and the AF may be treated much more effectively. The data acquisition from the array of multifunctional sensors is also very important for making the new devices useful. To operate the implanted device system, a battery is mostly used and it should be avoided to replace the battery by surgery. Therefore, various energy harvesting techniques or wireless energy transfer techniques to continuously feed the power to the system are under investigation. The development of these technologies was reviewed, and the current level of technology was reviewed and summarized.

Journal ArticleDOI
TL;DR: This paper proposes here an assembly method for facile construction of 3D microenvironment in a poly(dimethylsiloxane) (PDMS) channel using hydrogel units and expects to provide a beneficial tool for the 3D cell culture module and biomimetic engineering.
Abstract: Construction of three-dimensional (3D) microenvironment become an important issue in recent biological studies due to their biological relevance compared to conventional two-dimensional (2D) microenvironment. Various fabrication techniques have been employed to construct a 3D microenvironment, however, it is difficult to fully satisfy the biological and mechanical properties required for the 3D cell culture system, such as heterogeneous tissue structures generated from the functional differences or diseases. We propose here an assembly method for facile construction of 3D microenvironment in a poly(dimethylsiloxane) (PDMS) channel using hydrogel units. The high-aspect-ratio of hydrogel units was achieved by fabricating these units using a 2D mold. With this approach, 3D heterogeneous hydrogel units were produced and assembled in a PDMS channel by structural hookup. In vivo-like 3D heterogeneous microenvironment in a precisely controllable fluidic system was also demonstrated using a controlled assembly of different types of hydrogel units, which was difficult to obtain from previous methods. By regulating the flow condition, the mechanical stability of the assembled hydrogel units was verified by the flow-induced deformation of hydrogel units. In addition, in vivo-like cell culture environment was demonstrated using an assembly of cell-coated hydrogel units in the fluidic channel. Based on these features, our method expects to provide a beneficial tool for the 3D cell culture module and biomimetic engineering.

Journal ArticleDOI
Chang-Hoon Han1, Chang-Hoon Han2, Yong-Hoon Yoon2, Seung-Deok Ko2, Min-Ho Seo2, Jun-Bo Yoon2 
TL;DR: In this paper, a C-V response tunable varactor was proposed to achieve linear frequency tuning with respect to a tuning voltage (V ) sweep in an inductor-capacitor (C) resonant system.
Abstract: This paper proposes a device level solution to achieve linear frequency tuning with respect to a tuning voltage (V tune ) sweep in an inductor (L)–capacitor (C) resonant system. Since the linearity of the resonant frequency vs. tuning voltage (f–V) relationship in an LC-resonant system is closely related to the C–V response characteristic of the varactor, we propose a C–V response tunable varactor to realize the linear frequency tuning. The proposed varactor was fabricated using microelectromechanical system (MEMS) surface micromachining. The fabricated MEMS varactor has the ability to dynamically change the C–V response characteristic according to a curve control voltage (V curve-control ). When V curve-control was increased from zero to 9 V, the C–V response curve was changed from a linear to a concave form (i.e., the capacitance decreased quickly in the low tuning voltage region and slowly in the high tuning voltage region). This change in the C–V response characteristic resulted in a change in the f–V relationship, and we successfully demonstrated almost perfectly linear frequency tuning in the LC-resonant system, with a linearity factor of 99.95%.

Journal ArticleDOI
TL;DR: In this paper, microelectromechanical systems (MEMS)-based Ni-B probes with enhanced mechanical properties for fine pitch testing were compared with conventional Ni-Co micro-probes in terms of the mechanical performance and thermal effect.
Abstract: We fabricated and characterized microelectromechanical systems (MEMS)-based Ni–B probes with enhanced mechanical properties for fine pitch testing. The Ni–B micro-probes were compared with conventional Ni–Co micro-probes in terms of the mechanical performance and thermal effect. The elastic modulus and hardness of Ni–B were found to be 240.4 and 10.9 GPa, respectively, which surpass those of Ni–Co. The Ni–B micro-probes had a higher contact force than the Ni–Co micro-probes by an average of 41.38% owing to the higher elastic modulus. The Ni–B micro-probes had a lower average permanent deformation than the Ni–Co micro-probes after the same overdrive was applied for 1 h by 56.58 µm. The temperature was found to have a negligible effect on the Ni–B micro-probes. These results show that Ni–B micro-probes are useful for fine pitch testing and a potential candidate for replacing conventional Ni–Co micro-probes owing to their advanced mechanical and thermal characteristics.

Journal ArticleDOI
TL;DR: Measurement of cell metabolic activity after dispensing confirmed that the dispensed cell proliferated at a rate comparable to that of the control group, demonstrating that the pneumatic dispensing system is a promising tool for fabrication of biomaterials.
Abstract: This paper presents results for dispensing living cells using a pneumatic dispensing system to verify the feasibility of using this system to fabricate biomaterials. Living cells (i.e., mouse 3T3-J2 fibroblast) were dispensed with different dispensing pressures in order to evaluate the effect of dispensing process on cell viability and proliferation. Based on the results of a live-dead assay, more than 80% of cell viability has been confirmed which was reasonably similar to that in the control group. Furthermore, measurement of cell metabolic activity after dispensing confirmed that the dispensed cell proliferated at a rate comparable to that of the control group. These results demonstrate that the pneumatic dispensing system is a promising tool for fabrication of biomaterials.

Journal ArticleDOI
Byeong Jun Hwang1, Sung Ho Lee1
TL;DR: In this article, the authors tried to prevent biofilm formation on the stainless steel (SS304) sheet surface with micro fabricated structure by forming microscale colloid patterns on the surface of stainless steel by using an electrochemical etching forming a pattern by using FeCl3 etching was further increase the surface roughness.
Abstract: Biofilm formed on the surface of the object by the microorganism resulting in fouling organisms. This has led to many problems in daily life, medicine, health and industrial community. In this study, we tried to prevent biofilm formation on the stainless steel (SS304) sheet surface with micro fabricated structure. After then forming the microscale colloid patterns on the surface of stainless steel by using an electrochemical etching forming a pattern by using a FeCl3 etching was further increase the surface roughness. Culturing the Pseudomonas aeruginosa on the stainless steel fabricated with a micro structure on the surface was observed a relationship between the surface roughness and the biological fouling of the micro structure. As a result, the stainless steel surface with a micro structure was confirmed to be the biological fouling occurs less. We expect to be able to solve the problems caused by biological fouling in various fields such as medicine, engineering, using this research.

Journal ArticleDOI
TL;DR: In this paper, a simple and novel method of refractometry that uses a micro image defocusing technique was proposed, which makes use of a three-pinhole aperture attached to a microscopic optical system.
Abstract: We herein report on a simple and novel method of refractometry that uses a micro image defocusing technique. This simple method makes use of a three-pinhole aperture attached to a microscopic optical system. In order to develop our proposed method, an analytical formula was derived from the principles of optical modelling, taking into consideration imaging optics, and was verified experimentally. In order to verify and demonstrate the method, the refractive index (RI) of several materials with known and certified RIs were measured. The results demonstrate a good level of accuracy, with a difference between the certification and the measurements of the order of 10−4 RIU (refractive index unit).