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Showing papers in "Vacuum in 2004"


Journal ArticleDOI
Yalan Hu1, Xungang Diao1, Cong Wang1, Weichang Hao1, Tianmin Wang1 
12 Jul 2004-Vacuum
TL;DR: In this paper, the effects of annealing on the structure, surface morphology, optical and electrical properties of indium tin oxide (ITO) films were studied and the results showed that the increase of the heating temperature improves the crystallinity of the ITO films, increases the surface roughness, and improves the optical properties.

226 citations



Journal ArticleDOI
29 Nov 2004-Vacuum
TL;DR: In this article, the authors used conventional magnetron sputtering in the sputtering ambient with various O 2 /Ar+O 2 ratios and at substrate temperatures between room temperature and 400°C.

165 citations


Journal ArticleDOI
16 Jan 2004-Vacuum
TL;DR: In this article, the optical properties of Ag2S are investigated using spectrophotometric measurements of transmittance and reflectance at normal incidence in the wavelength range 500-2200nm.

161 citations


Journal ArticleDOI
19 Apr 2004-Vacuum
TL;DR: In this article, a review of the common failures in artificial joints and the role of plasma coating in biomedical applications is presented. But, the authors do not consider the impact of plating on the performance of artificial joints.

135 citations


Journal ArticleDOI
03 May 2004-Vacuum
TL;DR: In this article, the effect of series resistance on capacitance and frequency characteristics of Zn/p-Si Schottky diodes with high resistivity has been given by admittance spectroscopy.

122 citations


Journal ArticleDOI
Ho-Chul Lee1, O Ok Park2
26 Jul 2004-Vacuum
TL;DR: In this paper, the authors measured carrier concentrations and mobilities of indium-tin-oxide (ITO) thin films by DC magnetron sputtering at various process temperatures using the Hall Technique.

93 citations


Journal ArticleDOI
24 May 2004-Vacuum
TL;DR: In this paper, two classes of thin film gas sensors have been studied: TiO 2 doped with Cr or Nb and TiO O 2 -SnO 2 mixed systems.

85 citations


Journal ArticleDOI
16 Aug 2004-Vacuum
TL;DR: In this article, a comparative study of four methods for extracting solar cell parameters of the single diode lumped circuit model is presented, which are usually the saturation current, the series resistance, the ideality factor, the shunt conductance and the photocurrent.

84 citations


Journal ArticleDOI
07 Jun 2004-Vacuum
TL;DR: In this paper, the influence of various bottom metal electrodes on the crystallinity and crystal orientation of aluminum nitride (AlN) thin films prepared on them in order to develop thin film bulk acoustic wave resonators was investigated.

83 citations


Journal ArticleDOI
05 Nov 2004-Vacuum
TL;DR: In this paper, the authors have taken advantage of the control of strains at the CdS films-substrate interfaces to obtain films with tunable energy band gap, and they have shown that on decreasing the amount of strain at the layer-to-glass substrate interface, the energy bands gap of the films also decreases.

Journal ArticleDOI
24 May 2004-Vacuum
TL;DR: In this article, the variation of lattice relaxations, surface energy and work function with slab thickness was examined for three low-index faces of α-iron by using first-principles methods.

Journal ArticleDOI
07 Jun 2004-Vacuum
TL;DR: In this article, thin ZnO-SnO 2 films were deposited on glass substrates by opposed planar magnetron sputtering, in which ZnOs and SnO 2 :Sb 2 O 5 3% doped) targets face each other.

Journal ArticleDOI
19 Apr 2004-Vacuum
TL;DR: In this paper, a densification process to plasma-sprayed YSZ coating was conducted with the aim of achieving a dense coating of necessary gastightness and an improved ionic conductivity.

Journal ArticleDOI
29 Oct 2004-Vacuum
TL;DR: In this paper, structural characterizations of tin oxide (SnO 2 ) thin films, deposited by plasmaenhanced chemical vapor deposition (PECVD), were investigated with scanning electron microscope (SEM), X-ray diffraction (XRD), and Xray photoelectron spectroscopy (XPS).

Journal ArticleDOI
29 Oct 2004-Vacuum
TL;DR: In this paper, a new empirical technique to construct predictive models of plasma etch processes is presented by combining a generalized regression neural network (GRNN) and a random generator (RG), which played a critical role to control neuron spreads in the pattern layer.

Journal ArticleDOI
26 Jul 2004-Vacuum
TL;DR: In this paper, the X-ray diffraction technique was used to determine the crystalline structure and grain size of the zinc telluride thin films, and the structure was found to be cubic with preferential orientation along a (1.1) plane and crystallite size of about 50-80 nm.

Journal ArticleDOI
PeiFeng Zhang1, Xiaoping Zheng1, Suoping Wu1, Jun Liu1, Deyan He1 
16 Jan 2004-Vacuum
TL;DR: In this paper, a three-dimensional kinetic Monte Carlo technique has been developed for simulating the growth of thin Cu films, which involves incident atom attachment, surface diffusion of the atoms on the growing surface and atom detachment from the surface.

Journal ArticleDOI
19 Apr 2004-Vacuum
TL;DR: A coaxial dielectric-barrier discharge (DBD) as an ozonized water reactor system has been developed and described in this article, which operates in the air at an atmospheric pressure.

Journal ArticleDOI
07 Jun 2004-Vacuum
TL;DR: In this article, the photocatalytic efficiency of TiO2/SnO2 (TiO2 overcoated with SnO2) heterojunction system was investigated.

Journal ArticleDOI
29 Oct 2004-Vacuum
TL;DR: In this paper, a generalised version of the slip equation is used to investigate low Knudsen number isothermal flow over walls with substantial curvature, and the generalised slip equation was written in terms of the tangential shear stress to overcome the limitations of the conventional slip boundary treatment.

Journal ArticleDOI
08 Mar 2004-Vacuum
TL;DR: In this paper, a review of ion-beam-defect processes in wide band-gap wurtzite semiconductors such as group-III nitrides and ZnO is presented.

Journal ArticleDOI
19 Apr 2004-Vacuum
TL;DR: In this article, a unified numerical model for the arc melting process is proposed to take into account the close interaction between the arc plasma and the liquid anode, and the anode penetration geometry as a function of time is predicted.

Journal ArticleDOI
29 Oct 2004-Vacuum
TL;DR: In this article, the effects of O2 flow ratio on resistivity, reflectance and transmittance of Ag oxide thin films were studied by sputtering an Ag target in an Ar+O2 mixed gas.

Journal ArticleDOI
Cristoforo Benvenuti1, Paolo Chiggiato1, Fabio Cicoira1, Y. L’Aminot1, V Ruzinov1 
19 Mar 2004-Vacuum
TL;DR: In this paper, a vacuum chamber coated with a thin getter film and then exposed to ambient air may be transformed into a pump by "in situ" heating at temperatures as low as 180°C.

Journal ArticleDOI
07 Jun 2004-Vacuum
TL;DR: In this article, a pulsed laser deposition (PLD) was employed for the preparation of nano-structured titanium dioxide (TiO2) thin films because of its advantage for materials with high melting point.

Journal ArticleDOI
26 Jul 2004-Vacuum
TL;DR: Amine-containing organic films are deposited onto silicon substrates from mass-selected beams of 5-200eV Si2NC8H19+ (silazane) and 15-100 eV C3H6N+ (allylamine) ions produced by electron impact ionization of 1,3-divinyltetramethyldisilazane and allylamine as mentioned in this paper.

Journal ArticleDOI
19 Apr 2004-Vacuum
TL;DR: In this article, the properties of borides formed on AISI 440C stainless-steel have been investigated by means of X-ray diffractometry, scanning electron microscopy, and optical microscopy.

Journal ArticleDOI
07 Jun 2004-Vacuum
TL;DR: In this article, a third amorphous phase was observed by cross-sectional transmission electron micrograph at the interface of the sol-gel derived TiO2/WO3 thin film, but was not at that of the sputtered thin film.

Journal ArticleDOI
08 Mar 2004-Vacuum
TL;DR: The experimental set-up for analysis of the charge of light ions scattered from surface atoms (ACOLISSA) is described in this paper, which is used for determination of flight times of low-energy ions.