Journal ArticleDOI
A review of techniques for polishing and planarizing chemically vapor-deposited (CVD) diamond films and substrates
TLDR
In this article, a review of polishing and planarization techniques for polycrystalline chemically vapor-deposited (CVD) diamond films and substrates is presented.About:
This article is published in Diamond and Related Materials.The article was published on 1999-07-01. It has received 173 citations till now. The article focuses on the topics: Chemical-mechanical planarization & Polishing.read more
Citations
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Journal ArticleDOI
The mechanical and strength properties of diamond
TL;DR: Two other groups of materials based on carbon, namely the fullerenes and graphines have been identified in recent years and are now the subject of intense research.
Journal ArticleDOI
Chemical mechanical polishing of thin film diamond
TL;DR: In this article, a Logitech Tribo CMP tool equipped with a polyurethane/polyester polishing cloth and an alkaline colloidal silica polishing fluid has been used to polish NCD films.
Journal ArticleDOI
Dry machining of aluminum-silicon alloy using polished CVD diamond-coated cutting tools inserts
TL;DR: In this paper, the role of machining parameters and cutting tool surface morphology on the aerosol generation was explored and it was shown that polishing of tools provides a better opportunity for an environmentally benign dry machining along with improvement in machining outcome.
Journal ArticleDOI
High precision pressure sensors based on SAW devices in the GHz range
TL;DR: In this article, an AlN/free-standing nanocrystalline diamond (NCD) system is proposed in order to process high frequency surface acoustic wave (SAW) resonators for sensing applications.
Journal ArticleDOI
Polishing of polycrystalline diamond by the technique of dynamic friction. Part 2: Material removal mechanism
TL;DR: In this article, the authors investigated the material removal mechanisms of PCD using the dynamic friction polishing technique and found that material removal occurred in a rather complex way, which can be a chemo-mechanical process, diffusion, oxidization and evaporation.
References
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Journal ArticleDOI
Diamond synthesis from gas phase in microwave plasma
TL;DR: In this paper, a crystal diamond predominantly composed of {100} and {111} faces was grown on a non-diamond substrate from a gaseous mixture of hydrogen and methane under microwave glow discharge conditions.
Book
Handbook of carbon, graphite, diamond, and fullerenes : properties, processing, and applications
TL;DR: A review of the science and technology of the element carbon and its allotropes: graphite, diamond, and the fullerenes is given in this paper, with a valuable, up-to-date account of both the newer and traditional forms of carbon, both naturally occurring and man-made.
Journal ArticleDOI
Diamond—Ceramic Coating of the Future
TL;DR: On etudie le depot chimique en phase vapeur et la croissance cristalline de revetement de diamant as mentioned in this paper, etudies le depot chambre et le departement chimique.
Book
Handbook of carbon, graphite, diamond, and fullerenes
TL;DR: The main forms are diamond and graphite, and they exhibit markedly different properties from other forms of carbon as mentioned in this paper, such as the properties of carbon nanotubes and carbon nano-graphs.
Book
Synthetic Diamond: Emerging CVD Science and Technology
Karl E. Spear,John P. Dismukes +1 more
TL;DR: The Vision of Diamond as an Engineered Material (M. Yoder) as discussed by the authors and the development and status of diamond-like carbon (A. Grill & B. Meyerson). Vapor Phase Diagnostics in Diamond CVD (H. Thorsheim & J. Butler). Physical, Chemical, and Microstructural Characterization and Properties of Diamond (W. van Enckevort). Optical Properties and Optoelectronic Applications of Diamond(J. Pankove & C.-H. Qiu). Industrial Applications of Single-Crystal Diamond (M Seal).